Study on Traceability and Calibration Method of the Load and Displacement of Nanomechanical Measurement System
DENG Mo-jie1,2,GAO Si-tian2,LU Ming-zhen2,DU Hua2,WEI Xiao-lin3
1. China Jiliang University,Hangzhou,Zhejiang 310018,China
2.National Institute of Metrology,Beijing 100013,China
3. Beijing Aerospace Institute for Metrology and Measurement Technology,Beijing 100076,China
Abstract:A study on the traceability and calibration method of the load and displacement scale factor of the instruments on the quasistatic nanoindentation mode is described. The load scale factor is the ratio of the displacement voltage, which can be obtained from a group of standard weights. The displacement scale factor represents the correlation between the displacement voltages and the displacement of the transducer.The calibration system has been tested by standard samples and been well verified in international comparison.
邓墨杰,高思田,卢明臻,杜华,魏小林. 纳米力学测量系统的载荷与位移溯源校准方法研究[J]. 计量学报, 2012, 33(4): 289-293.
DENG Mo-jie,GAO Si-tian,LU Ming-zhen,DU Hua,WEI Xiao-lin. Study on Traceability and Calibration Method of the Load and Displacement of Nanomechanical Measurement System. Acta Metrologica Sinica, 2012, 33(4): 289-293.
[1]张泰华,杨业敏.纳米硬度技术的发展和应用[J].力学进展,2002,32(3):349-351.
[2]张泰华. 微/纳米力学测试技术及其应用[M] .北京:机械工业出版社,2005,20-35.
[3]魏小林,高思田,杜华.纳米力学测量系统的校准与测试[J].仪器仪表学报,2009,30(6):53-54.
[4]Oliver W C,Pharr G M. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments[J].J Mater Res,1992,7(6):1564-1583.
[5]VanLandingham M R. Review of instrumented indentation [J].Journal of Research of the National Institute of Standards and Technology,2003, 108(4): 249-265.
[6]Stibler A,Herrmann K . Indirect verification of elastomer hardness testing using hardness reference blocks[C]// Recent advancement of theory and practice in hardness measuring, Tsukuba,Japan,2007, 112-116.
[7]杜华,高思田,魏小林,等.压入法纳米硬度测量与亚太国际比对[J].仪器仪表学报,2009,30(6):815-819.
[8]ISO 14577-2:2002,Metallic Materials-Instrumented Indentation Test for Hardness and Materials Parameters[S].
[9]ISO 14577-3:2002, Metallic Materials-Instrumented Indentation Test for Hardness and Materials Parameters[S].