Abstract：To separate the system error of precision stage, a new method for separation was put forward. Firstly different positions of auxiliary measuring grid plate and 2D-stage were measured. Then according to the measurement data of mark points on the grid plate and their corresponding nominal values, a mathematical model for error separation was established, which could separate errors from the measured results. The effectiveness of the algorithm was verified through simulation. Simulation results showed that when there was no measurement noise, the algorithm could realize complete error separation, while in the case of the presence of measurement noise, the relative error of standard deviation of calculated values and the given values were 1.95% and 1.52% in X-axis and Y-axis respectively. For noises with different amplitudes, the calculated values of system errors were stable. The algorithm is not sensitive to noise and can be very useful in evaluation of measurement results and instrument performances.
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2014, Vol. 35 
