扫描电子显微镜（SEM）作为一种有效的显微结构测量工具,可以对各种材料进行表面的观察与分析。尤其是对100 nm以下的微纳几何结构的测量中,SEM成为了主要的测量工具之一。为实现SEM的量值校准与溯源,研制了计量型SEM。装置采用样品台扫描的方式得到样板二维结构,利用激光干涉仪将测量值直接溯源到激光波长。实现了纳米尺度的结构测量,并溯源到米定义国家基准。该仪器对用于校准扫描电镜的标准样板进行测量和不确定度评估,对栅格测量的不确定度优于20 nm。

Scanning electron microscope (SEM) is an effective tool in microstructure analysis and measurement.The surface of various materials can be analyzed by SEM.SEM has become one of the main measurement tool especially for micro-nano geometry measurement under 100 nm.The instrument of the metrological SEM is developed for calibration nanostructure and realized the traceability of SEM.The 2 dimensional structure of sample is obtained by stage scanning, and the measured result is traced to laser wavelength by interferometer.The nano structure dimension is measured and traced to SI unit.The SEM calibration artifact is measured by this instrument and the uncertainty is evaluated,and an uncertainty better than 20 nm is obtained for grating artifices.