乐甫波的液体粘度传感研究

王萌阳; 陈智军; 蒋玲; 刘敬勇; 童锐

doi:10.3969/j.issn.1000-1158.2015.03.15

PDF(2282 KB)

计量学报 ›› 2015, Vol. 36 ›› Issue (3) : 295-298. DOI: 10.3969/j.issn.1000-1158.2015.03.15

乐甫波的液体粘度传感研究

王萌阳¹,陈智军^1,2,蒋玲¹,刘敬勇³,童锐¹

作者信息 +

Research on Liquid Viscosity Sensitivity Using Love Wave Device

WANG Meng-yang¹,CHEN Zhi-jun^1,2,JIANG Ling¹,LIU Jing-yong³,TONG Rui¹

Author information +

文章历史 +

摘要

利用部分波理论和边界条件精确推导,对“粘性液体/非压电薄膜/压电基底”3层乐甫波结构建模,分析得出随叉指周期变小,液体粘度灵敏度提高,传播衰减增大;随“薄膜厚度与波长之比”增大,液体的粘度灵敏度随之先减小再增大,液体密度灵敏度几乎为零。优化设计了以36°钽酸锂和SiO₂为基底和薄膜的乐甫波器件,制作并测试实物,实验结果与数值仿真基本一致,表明了理论模型的正确性。

Abstract

he theory model of Love wave loaded with viscous liquid is established, the influences of liquid viscosity on propagation velocity of Love wave are analyzed. The thickness of the film is optimized and the Love wave device is fabricated on 36°LiTaO₃ with a SiO₂ film overlaid. The device is fabricated and tested, The experimental results are basically in accordance with simulation analysis, proving the validity of theory model.

导出引用

王萌阳,陈智军,蒋玲,刘敬勇,童锐. 乐甫波的液体粘度传感研究[J]. 计量学报. 2015, 36(3): 295-298 https://doi.org/10.3969/j.issn.1000-1158.2015.03.15

WANG Meng-yang,CHEN Zhi-jun,JIANG Ling,LIU Jing-yong,TONG Rui. Research on Liquid Viscosity Sensitivity Using Love Wave Device[J]. Acta Metrologica Sinica. 2015, 36(3): 295-298 https://doi.org/10.3969/j.issn.1000-1158.2015.03.15

参考文献

［1］Avelino H M T, Fareleira J, Wakeham W A. Simultaneous measurement of the density and viscosity of compressed liquid toluene［J］. International Journal of Thermophysics, 2003, 24(2): 323-336.
［2］Chen Z J, Han T, Shi W K, et al. Separate determination of liquid properties with Lamb wave devices［C］// IEEE. International Frequency Control Symposium and Exposition, 2006 IEEE, Miami, FL,2006: 322-327.
［3］潘海峰, 朱惠忠, 冯冠平. 适合于液相检测的乐甫波传感器［J］. 仪表技术与传感器, 2003, (3): 10-12.
［4］Herrmann F, Jakoby B, Rabe J, et al. Microacoustic sensors for liquid monitoring［J］. Sensors Update, 2001, 9(1): 105-160.
［5］Kondoh J, Shiokawa S. Shear-Horizontal Surface Acoustic Wave Sensors［J］. Sensors Update, 1999, 6(1): 59-78.
［6］Josse F, Bender F, Cernosek R W, et al. Guided SH-SAW sensors for liquid-phase detection ［C］// IEEE. Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International, Seattle, WA, 2001: 454-461.
［7］武以立. 声表面波原理及其在电子技术中的应用［M］. 国防工业出版社, 1983, 6-8.