2025年04月10日 星期四 首页   |    期刊介绍   |    编 委 会   |    投稿指南   |    期刊订阅   |    统合信息   |    联系我们
计量学报  2015, Vol. 36 Issue (5): 455-459    DOI: 10.3969/j.issn.1000-1158.2015.05.02
  本期目录 | 过刊浏览 | 高级检索 |
微纳米三坐标测量机的高精度恒温箱研制
冯建1,李瑞君1,何亚雄1,范光照1,2
1.合肥工业大学仪器科学与光电工程学院,安徽 合肥 230009;
2. 台湾大学机械工程学系,  台北  10617
Development of a High Precision Constant-temperature Chamber for Micro-nanometric CMM
FENG Jian1,LI Rui-jun1,HE Ya-xiong1,FAN Kuang-chao1,2
1. School of Instr Sci & Opto-electric Engineering, Hefei University of Technology, Hefei, Anhui 230009, China; 
2. Department of Mechanical Engineering, Taiwan University, Taipei 10617,China
全文: PDF (5418 KB)   HTML (1 KB) 
输出: BibTeX | EndNote (RIS)      
摘要 针对恒温室控制精度低和分离式恒温箱因振动而无法满足微纳米三坐标测量机需要的问题,研制了一套自然对流式高精度恒温箱。用定制尺寸的中空亚克力板和轻便型超低导热系数真空绝热板制成绝热箱体。以仪器测量点温度作为温度控制反馈值,均匀位于恒温箱顶部的9个半导体制冷片对其周围空气进行制冷,箱内冷空气均匀向下流动,与向上流动的热空气进行热交换。采用LabVIEW与MATLAB混合编写高精度温控程序。实验结果表明:设定值为20 ℃时的稳态误差为0.003 2 ℃,稳态时温度波动小于0.03 ℃,优于一级恒温室。新型恒温箱具有成本低、能耗小和无振动干扰等优点。
服务
把本文推荐给朋友
加入我的书架
加入引用管理器
E-mail Alert
RSS
作者相关文章
冯建
李瑞君
何亚雄
范光照
关键词 计量学微纳米三坐标测量机恒温箱半导体制冷片真空绝热板自然对流    
Abstract:The spacious constant-temperature room and the separated constant-temperature chambers can’t meet the requirement of micro-nanometric CMM because of low precision and vibration seperately. A high precision constant-temperature chamber based on the natural convection principle is developed. The walls of the custom-designed chamber is made of hollow acrylic upon which a lightweight thin vacuum insulation plate with ultra-low thermal conductivity coefficient is adhered. The temperature value of the instrument measuring point is taken as the feedback signal. Nine thermoelectric coolers used to cool the air inside the chamber are arranged on the ceiling of the chamber uniformly. The down flowing cool air and the up flowing hot air forms natural convection. The program of the high accuracy temperature-controlled system is developed using LabVIEW and MATLAB software. The experimental results show that the system steady-state error is 0.0032 ℃ on average, and the variation range is less than 0.03 ℃ when the set temperature is 20 ℃. It is superior to a Class I standard room. The new type constant-temperature chamber has the advantages of low cost, low energy consumption and no vibration.
Key wordsmetrology    micro-nanometric CMM    constant-temperature chamber    thermoelectric cooler    vacuum insulation panel    natural convection principle
    
基金资助:国家自然科学基金(51275148,51175141); 安徽省高等学校省级自然科学研究重点项目(KJ2014A021)
作者简介: 冯建(1990-),男,江西萍乡人,合肥工业大学硕士生,主要从事微纳米精密仪器测量与控制的研究。fengjian817@126.com
引用本文:   
冯建,李瑞君,何亚雄,范光照. 微纳米三坐标测量机的高精度恒温箱研制[J]. 计量学报, 2015, 36(5): 455-459.
FENG Jian,LI Rui-jun,HE Ya-xiong,FAN Kuang-chao. Development of a High Precision Constant-temperature Chamber for Micro-nanometric CMM. Acta Metrologica Sinica, 2015, 36(5): 455-459.
链接本文:  
http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2015.05.02     或     http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2015/V36/I5/455
京ICP备:14006989号-1
版权所有 © 《计量学报》编辑部
地址:北三环东路18号(北京1413信箱)  邮编:100029 电话:(010)64271480
本系统由北京玛格泰克科技发展有限公司设计开发  技术支持:support@magtech.com.cn