计量型紫外光学显微镜自动对焦系统的研究

doi:10.3969/j.issn.1000-1158.2014.z1.06

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摘要计量型紫外光学显微镜是一套采用248 nm深紫外光线以及100倍紫外物镜的可溯源光学设备,其光学分辨率可以达到100 nm。如此高分辨率导致深紫外显微镜景深只有μm量级,轻微的扰动将会导致严重的离焦现象,因此在计量型紫外光学显微镜对掩模板进行测量过程中需要实时自动聚焦,避免离焦影响测量精度。计量型紫外光学显微镜的自动聚焦系统通过紫外相机、紫外物镜、nm级物镜执行器获取一系列光学切片图像,然后通过设置关键区域作为对焦窗口,同时采用基于coif小波变换的图像清晰度评价函数找到最佳聚焦位置,最终采用VC与Matlab混合编程实现紫外光学测量时的自动聚焦。经过实验验证该套自动聚焦系统最终对焦精度可达0.5 μm。

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	尹传祥
	高思田
	李琪
	李伟
	施玉书
	李适

关键词 ：计量学, 自动对焦, 混合编程, 小波变换, 清晰度评价函数

Abstract：The metrological ultraviolet microscope is a traceable optical device.It uses 248 nm deep ultraviolet illumination light and a 100 × UV objective lens to up to 100 nm optical resolution.Because of the high resolution,it will be easily occur defocus phenomenon.In order to enhance the measurement accuracy, it is required the real-time auto-focus function when measuring lithography photomask.As a part of metrological UV microscope, the auto-focus system utilizes UV camera, UV lens, and lens actuator to obtain a series of optical slice images,then several key areas are set as the focus window,next the image sharpness evaluation function based on coif wavelet transform is used to find the best focus position.Finally, the mixed technology of VC and Matlab is used to achieve auto-focus for the optical measurement.After experimental verification, it is proved that the focusing accuracy of the system can achieve 0.5μm.

Key words： Metrology Auto-focusing Mixed programming Wavelet transform Clarity-evaluation function

基金资助:国家科技支撑计划（2011BAK15B00）;微纳米技术计量标准和标准物质研究（2011BAK15B01）

作者简介: 尹传祥（1991-）,男,安徽宿州人,合肥工业大学硕士研究生,主要从事显微镜纳米测量的研究。yinchx@nim.ac.cn

引用本文:

尹传祥,高思田,李琪,李伟,施玉书,李适. 计量型紫外光学显微镜自动对焦系统的研究[J]. 计量学报, 2014, 35(z1): 26-30.
YIN Chuan-xiang,GAO Si-tian,LI Qi,LI Wei,SHI Yu-shu,LI Shi. Research of Auto-focus System on Metrological Ultraviolet Microscope. Acta Metrologica Sinica, 2014, 35(z1): 26-30.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2014.z1.06 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2014/V35/Iz1/26