二维光学标准器校准影像测量仪方法研究

doi:10.3969/j.issn.1000-1158.2014.z1.04

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摘要依据JJF1318—2011影像测量仪校准规范,分析了影像测量仪的校准项目及校准方法。介绍了影像测量仪的量值溯源体系;设计多种规格的二维光学标准器用于影像测量仪多项参数的校准,并详细介绍了校准过程。用二维掩膜板对影像测量仪尺寸测量误差进行实验校准,分析了测量数据并对校准结果进行测量不确定度评定。

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	孙双花
	薛梓
	王鹤岩

关键词 ：计量学, 二维光学标准器, 探测误差, 尺寸测量误差, 掩膜板, 测量不确定度

Abstract：According to JJF1318-2011 Calibration Specification for Imaging Probe Measuring Machines, the image measuring instrument calibration parameters and calibration method is analyzed. The traceability system of the image measuring instrument is introduced. A variety of specifications of the two-dimensional optical standard are designed, and the calibration procedures are expounded in detail. Length measurement error is tested by two-dimensional grid photomask and measurement data is analyzed. The measurement uncertainty is evaluated carefully, including its sources and values.

Key words： Metrology Two-dimensional optical standard Probing error Length measurement error Photomask Measurement uncertainty

基金资助:国家自然科学基金(51305416)

作者简介: 孙双花（1980-）,女,黑龙江青冈人,中国计量科学研究院副研究员,博士,主要从事几何量计量、线纹计量的研究。sunshh@nim.ac.cn

引用本文:

孙双花,薛梓,王鹤岩. 二维光学标准器校准影像测量仪方法研究[J]. 计量学报, 2014, 35(z1): 14-18.
SUN Shuang-hua,XUE Zi,WANG He-yan. Image Measuring Instrument Calibration with Two-dimensional Optical Standard. Acta Metrologica Sinica, 2014, 35(z1): 14-18.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2014.z1.04 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2014/V35/Iz1/14