Research on Liquid Viscosity Sensitivity Using Love Wave Device
WANG Meng-yang1,CHEN Zhi-jun1,2,JIANG Ling1,LIU Jing-yong3,TONG Rui1
1.College of Automation Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing, Jiangsu 210016, China;
2.Modern Acoustics in Key Laboratory of Ministry of Education, Nanjing University, Nanjing, Jiangsu 210093, China;
3. No.55 Research Institute, China Electronics Technology Group Corporation, Nanjing, Jiangsu 210008, China
Abstract:he theory model of Love wave loaded with viscous liquid is established, the influences of liquid viscosity on propagation velocity of Love wave are analyzed. The thickness of the film is optimized and the Love wave device is fabricated on 36°LiTaO3 with a SiO2 film overlaid. The device is fabricated and tested, The experimental results are basically in accordance with simulation analysis, proving the validity of theory model.
[1]Avelino H M T, Fareleira J, Wakeham W A. Simultaneous measurement of the density and viscosity of compressed liquid toluene[J]. International Journal of Thermophysics, 2003, 24(2): 323-336.
[2]Chen Z J, Han T, Shi W K, et al. Separate determination of liquid properties with Lamb wave devices[C]// IEEE. International Frequency Control Symposium and Exposition, 2006 IEEE, Miami, FL,2006: 322-327.
[3]潘海峰, 朱惠忠, 冯冠平. 适合于液相检测的乐甫波传感器[J]. 仪表技术与传感器, 2003, (3): 10-12.
[4]Herrmann F, Jakoby B, Rabe J, et al. Microacoustic sensors for liquid monitoring[J]. Sensors Update, 2001, 9(1): 105-160.
[5]Kondoh J, Shiokawa S. Shear-Horizontal Surface Acoustic Wave Sensors[J]. Sensors Update, 1999, 6(1): 59-78.
[6]Josse F, Bender F, Cernosek R W, et al. Guided SH-SAW sensors for liquid-phase detection [C]// IEEE. Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International, Seattle, WA, 2001: 454-461.
[7]武以立. 声表面波原理及其在电子技术中的应用[M]. 国防工业出版社, 1983, 6-8.