为了提高单体式称量机构的灵敏度,对微克级的单体式称量机构进行性能分析与优化,建立了基于椭圆形柔性铰链称量机构的数学模型;以称量机构的横梁末端位移来评价称量机构的灵敏度,通过在不同部分改变铰链厚度,分别验证椭圆形和圆弧形铰链对称量机构灵敏度的影响。结合Ansys Workbench有限元仿真软件对模型的准确确度进行了验证,给出了针对柔性铰链划分网格时的评价依据,结果表明:模型的最小误差为1.8%;且在 1μg 载荷下,椭圆形铰链相比于圆弧形增加了0.39nm的末端位移。
Abstract
To improve the sensitivity of single weighing mechanism, the performance of microgram monomer weighing mechanism was analyzed and optimized, and the mathematical model of the weighing mechanism based on elliptical flexure hinge was established. The sensitivity of the weighing mechanism was evaluated by the end displacement of the beam of the weighing mechanism. The influence of elliptical and circular hinge on the sensitivity of the weighing mechanism was verified by changing the hinge thickness in different parts. The accuracy of the model was verified with Ansys Workbench finite element simulation software, and the evaluation basis for the mesh division of flexible hinges was given. The results show that the minimum error of the model is 1.8%, and under 1μg load, the end displacement of elliptical hinge increases by 0.39nm compared with circular hinge.
关键词
质量计量;微克级称量 /
单体式称量机构;椭圆形柔性铰链;有限元仿真
Key words
mass metrology /
microgram weighing /
monomer weighing mechanism /
elliptical flexure hinge;finite element simulation
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