基于激光热成像的薄膜面向导热系数测试方法

陈明鑫; 侯德鑫; 叶树亮

doi:10.3969/j.issn.1000-1158.2024.01.01

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计量学报 ›› 2024, Vol. 45 ›› Issue (1) : 1-8. DOI: 10.3969/j.issn.1000-1158.2024.01.01

热学计量

基于激光热成像的薄膜面向导热系数测试方法

陈明鑫,侯德鑫,叶树亮

作者信息 +

Test Method of In-plane Thermal Conductivity of Thin Films Based on Laser Thermal Imaging

CHEN Mingxin,HOU Dexin,YE Shuliang

Author information +

文章历史 +

摘要

提出一种基于激光热成像的薄膜面向导热系数测试方法。仿真论证了激光加热相较于常规电加热方案的热损失差异;分析了激光加热功率、表面换热系数、测温模型增益系数等关键参数标定问题,并设计了相应的方案。基于15个不同材料或厚度的薄膜和薄片样品进行了实验,测试结果和参考值相对偏差均<6%,其中导热系数 <3W/(m·K) 的样品测试误差显著优于常规方法,这表明该方法可有效改善热流环路积分法对低导热薄膜的测试精度。

Abstract

A laser-based heat flow loop integration test method is proposed to simulate and demonstrate the difference in heat loss between laser heating and conventional electrical heating solutions; the calibration of key parameters such as laser heating power, surface heat transfer coefficient and temperature measurement model gain coefficient are analysed and the corresponding methods are designed. The experiments are based on 15 thin films and sheets of different materials or thicknesses, and the relative deviations between the test results and the reference values are less than 6%. The test errors of samples with thermal conductivity less than 3W/(m·K)are significantly better than those of the conventional method, indicating that the method can effectively improve the test accuracy of the heat flow loop integration method for low thermal conductivity films.

导出引用

陈明鑫,侯德鑫,叶树亮. 基于激光热成像的薄膜面向导热系数测试方法[J]. 计量学报. 2024, 45(1): 1-8 https://doi.org/10.3969/j.issn.1000-1158.2024.01.01

CHEN Mingxin,HOU Dexin,YE Shuliang. Test Method of In-plane Thermal Conductivity of Thin Films Based on Laser Thermal Imaging[J]. Acta Metrologica Sinica. 2024, 45(1): 1-8 https://doi.org/10.3969/j.issn.1000-1158.2024.01.01

中图分类号： TB941

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