基于非本征F-P干涉技术的全光纤位移测量系统

马英瀚; 张树; 皮磊; 阎晗; 胡佳成; 施玉书

doi:10.3969/j.issn.1000-1158.2023.12.03

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计量学报 ›› 2023, Vol. 44 ›› Issue (12) : 1799-1804. DOI: 10.3969/j.issn.1000-1158.2023.12.03

几何量计量

基于非本征F-P干涉技术的全光纤位移测量系统

马英瀚¹,张树^2,3,皮磊²,阎晗¹,胡佳成¹,施玉书^2,3

作者信息 +

All-fiber Displacement Measurement System Based on Extrinsic F-P Interferometry

MA Ying-han¹,ZHANG Shu^2,3,PI Lei²,YAN Han¹,HU Jia-cheng¹,SHI Yu-Shu^2,3

Author information +

文章历史 +

摘要

为解决传统分离镜组式干涉仪体积较大,无法在空间受限的环境条件下应用的问题,开展了全光纤F-P干涉位移测量技术研究。根据干涉原理分析了不同反射率条件对干涉信号形式的影响,计算得出:当反射率为4%时,多光束干涉的光强信号将近似为正弦函数,并利用有限元仿真对位移测量原理进行验证。设计搭建了基于非本征F-P干涉技术的全光纤位移测量系统。实验结果表明:该系统在1min内静态噪声电压标准差为23.3mV;在1mm位移范围内,该系统与XL-80激光干涉仪的测量结果呈现高度线性关系,线性相关系数R2为1,且该系统位移测量重复性优于XL-80激光干涉仪。

Abstract

In order to solve the problem that the traditional separation mirror group interferometer is too large to be applied in the environment with limited space, all-fiber F-P interferometry displacement measurement technology is studied. According to the interference principle, the influence of different reflectivity conditions on the interference signal form is analyzed. When the reflectivity is 4%, the light intensity signal of multi-beam interference will be approximately a sine function, and the displacement measurement principle is verified by finite element simulation. An all-fiber displacement measurement system based on extrinsic F-P interferometry is designed and built. The experimental results show that the standard deviation of static noise voltage within 1min of the system is 23.3mV, and the linear correlation coefficient R2 of displacement measurement results between the system and commercial XL-80 laser interferometer is 1 within 1mm displacement, and the measurement repeatability of the system is better than that of commercial laser interferometer.

导出引用

马英瀚,张树,皮磊,阎晗,胡佳成,施玉书. 基于非本征F-P干涉技术的全光纤位移测量系统[J]. 计量学报. 2023, 44(12): 1799-1804 https://doi.org/10.3969/j.issn.1000-1158.2023.12.03

MA Ying-han,ZHANG Shu,PI Lei,YAN Han,HU Jia-cheng,SHI Yu-Shu. All-fiber Displacement Measurement System Based on Extrinsic F-P Interferometry[J]. Acta Metrologica Sinica. 2023, 44(12): 1799-1804 https://doi.org/10.3969/j.issn.1000-1158.2023.12.03

中图分类号： TB921

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