双臂非共程点光源非定域干涉小角度测量方法

张宝武; 崔建军; 欧阳烨锋; 陈恺; 方振远

doi:10.3969/j.issn.1000-1158.2023.08.08

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计量学报 ›› 2023, Vol. 44 ›› Issue (8) : 1202-1207. DOI: 10.3969/j.issn.1000-1158.2023.08.08

几何量计量

双臂非共程点光源非定域干涉小角度测量方法

张宝武¹,崔建军²,欧阳烨锋¹,陈恺²,方振远¹

作者信息 +

The Method to Measure Small Angle by Two-arm Non-common Path Non-localized Interference of Point Light Source

ZHANG Bao-wu¹,CUI Jian-jun²,OUYANG Ye-feng¹,CHEN Kai²,FANG Zhen-yuan¹

Author information +

文章历史 +

摘要

为了提高小角度测量的精度,提出了一种双臂非共程点光源非定域干涉小角度测量方法。通过建立小角度测量的理论模型,搭建测角系统,并采用大靶面无镜头小像素的CCD记录干涉同心圆环。其原理为利用暗环和亮环兼顾的多圆环回归拟合系列圆环圆心定位方法实现圆心侧移量的高精度测量,完成与激光干涉小角度测量仪进行比较测量实验。结果显示,所提方法在3h之内,x方向上的稳定性波动幅度最大为-2.46″,y方向上的稳定性波动幅度最大值为-1.92″;测角重复性在±0.50″内最大偏差为-0.45″,与激光干涉小角度测量仪具有较好的一致性。

Abstract

In order to enhance the measurement precision of the small angle, a method to measure small angle by two-arm non-common path non-localized interference of point light source is presented. In the method, the angle measurement system is built by establishing the theoretical model of small angle measurement, and the interference concentric rings are recorded by the CCD without lens and small pixs on the large target surface. The principle of the method is to fit a series of rings and circle center positioning method by multi-ring regression with both dark ring and bright ring. The method can measure the lateral shift of the center of the circle with high precision, and complete the comparison measurement experiment with the laser interference small angle measuring instrument. For the proposed angle system, the results show that the maximum fluctuation of the stability is -2.46″ in the x direction, and -1.92″ in the y direction within three hours; the repeatability had good agreement with the small angle laser interference within ±0.50″ which has a maximum deviation of -0.45″.

导出引用

张宝武,崔建军,欧阳烨锋,陈恺,方振远. 双臂非共程点光源非定域干涉小角度测量方法[J]. 计量学报. 2023, 44(8): 1202-1207 https://doi.org/10.3969/j.issn.1000-1158.2023.08.08

ZHANG Bao-wu,CUI Jian-jun,OUYANG Ye-feng,CHEN Kai,FANG Zhen-yuan. The Method to Measure Small Angle by Two-arm Non-common Path Non-localized Interference of Point Light Source[J]. Acta Metrologica Sinica. 2023, 44(8): 1202-1207 https://doi.org/10.3969/j.issn.1000-1158.2023.08.08

中图分类号： TB922

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