2～10&mu;m台阶高度标准物质候选物的研制和质量评价

柳迪; 王琛英; 张雅馨; 王云祥; 王松; 陈伦涛; 王永录; 朱楠; 蒋庄德

doi:10.3969/j.issn.1000-1158.2024.03.01

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计量学报 ›› 2024, Vol. 45 ›› Issue (3) : 305-310. DOI: 10.3969/j.issn.1000-1158.2024.03.01

几何量计量

2～10μm台阶高度标准物质候选物的研制和质量评价

柳迪^1,3,王琛英^2,3,张雅馨^1,3,王云祥⁴,王松^1,3,陈伦涛^1,3,王永录³,朱楠^{3,蒋庄德^1,3}

作者信息 +

Fabrication and Quality Evaluation of 2～10μm Step Height Reference Material Candidates

LIU Di^1,3,WANG Chenying^2,3,ZHANG Yaxin^1,3,WANG Yunxiang⁴,WANG Song^1,3,CHEN Luntao^1,3,WANG Yonglu³,ZHU Nan³,JIANG Zhuangde^1,3

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文章历史 +

摘要

微米台阶高度标准物质用于校准仪器z轴性能,传递准确的微米高度量值。利用光刻结合干法刻蚀工艺实现公称高度为2,5,10μm台阶高度标准物质候选物的制备,并对台阶高度、粗糙度和上下表面平行度进行表征。使用激光共聚焦显微镜和非球面测量仪进行测量,基于双边算法、直方图法、ISO算法和光学显微解耦合准则(LEL)法对台阶高度进行评定,对于同一标准物质候选物各评定方法间的标准差均不超过0.024μm,台阶高度评定值的相对偏差均在5%以内,表明不同算法的评定结果一致性水平较高且量值可靠;不同仪器的评定结果对比,说明了评定方法之间也具有良好的一致性;同时,粗糙度不超过0.04μm,上下表面平行度不超过0.03°,验证了标准物质候选物制备效果良好。

Abstract

The micrometer step height reference materials can used to calibrate the z-axis performance of the instrument and transmit accurate micrometer height values. The step height reference material candidates with 2,5,10μm nominal size are prepared by photolithography combined with dry etching. The height, roughness, and parallelism of the steps are characterized. Using a laser confocal microscope and an aspheric measuring instrument for measurement, the step height is evaluated based on the bilateral algorithm, histogram method, International Organization for Standardization (ISO algorithm, and the decoupling criterion for optical microscopy (LEL) method. For the same reference material candidates, the standard deviation between each evaluation method does not exceed 0.024μm. Moreover, the relative deviation of the step height evaluation values is within 5%. This indicates that the evaluation results obtained using different algorithms and instruments have a high level of consistency and reliable measurement values. The comparison of evaluation results from different instruments indicates that the evaluation methods also have good consistency. Meanwhile, the roughness does not exceed 0.04μm. The parallelism of the upper and lower surfaces does not exceed 0.03°, which verifies the good preparation effect of the reference material candidates.

导出引用

柳迪,王琛英,张雅馨,王云祥,王松,陈伦涛,王永录,朱楠,蒋庄德. 2～10μm台阶高度标准物质候选物的研制和质量评价[J]. 计量学报. 2024, 45(3): 305-310 https://doi.org/10.3969/j.issn.1000-1158.2024.03.01

LIU Di,WANG Chenying,ZHANG Yaxin,WANG Yunxiang,WANG Song,CHEN Luntao,WANG Yonglu,ZHU Nan,JIANG Zhuangde. Fabrication and Quality Evaluation of 2～10μm Step Height Reference Material Candidates[J]. Acta Metrologica Sinica. 2024, 45(3): 305-310 https://doi.org/10.3969/j.issn.1000-1158.2024.03.01

中图分类号： TB92

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