SiO2-SiNX体系光学谐振腔对Ti超导薄膜特性的研究

doi:10.3969/j.issn.1000-1158.2023.04.09

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摘要设计良好的光学谐振腔是提高超导转变边沿传感器(TES)光学效率的有效手段,光学谐振腔结构厚度的变化,不仅对TES的光学效率有影响,而且会产生不同的残余应力进而影响TES的超导特性。研究了以超导Ti膜为TES功能层材料,同时选用SiO2-SiNx体系作为光学谐振腔薄膜。通过对数值仿真,确定了SiO2-SiNx体系光学谐振腔薄膜厚度变化对Ti-TES光学吸收效率的影响。分析了SiO2-SiNx体系光学谐振腔不同薄膜厚度的变化自身应力随之变化的趋势,最后制备了不同厚度SiO2-SiNx光学谐振腔的TES,并进行光学吸收效率的测试,验证了SiO2-SiNx体系光学谐振腔薄膜厚度对Ti-TES光学吸收效率变化的规律。

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	刘海燕
	孙潇莹
	李劲劲
	王雪深
	陈建
	高鹤
	周哲海
	徐骁龙

关键词 ：计量学, TES;超导薄膜, 光学谐振腔, SiO2-SiNx体系, Ti膜

Abstract：Well-designed optical cavity is an effective method to improve the optical efficiency of superconducting transition edge sensor (TES). Changes in the multi-layer films' thickness of the optical cavity affect not only the optical efficiency but also the superconducting performance of TES due to the changes in film's stress. The Ti film is selected as the superconducting material of the TES functional layer due to its excellent characteristics at low temperature. Also, the SiO2-SiNx system is selected as the optical cavity film. Through the numerical simulation of the film thickness, the influence of the thickness of the SiO2-SiNx system optical resonator film on the optical absorption efficiency of Ti-TES is determined. Analyzed the tendency of the stress of the SiO2-SiNx system optical resonator with different film thicknesses, and finally prepared TES with different thicknesses of the SiO2-SiNx optical resonator, and tested the optical absorption efficiency to verify the SiO2-SiNx The influence of the film thickness of the system optical resonator on the Ti-TES optical absorption efficiency.

Key words： metrology TES superconducting thin film optical cavity SiO2-SiNx system titanium film

收稿日期: 2021-04-30 发布日期: 2023-04-18

PACS:

TB96

基金资助:国家自然科学基金青年科学基金(61901432,61701470);国家市场监督管理总局科技计划(2020MK153,2019MK112);中国计量科学研究院基本科研业务费重点领域项目(AKYZD1903);北京长城学者支持计划(CIT&TCD20190323);北京青年拔尖人才支持计划(Z2019042)

通讯作者: 徐骁龙(1988-),男,安徽池州人,中国计量科学研究院副研究员,主要从事计量用量子芯片方面的研究。Email: xiaolong.xu@nim.ac.cn E-mail: xiaolong.xu@nim.ac.cn

作者简介: 刘海燕(1991-),女,安徽淮北人,北京信息科技大学研究生,研究方向为光电检测技术。Email: 845272687@qq.com

引用本文:

刘海燕,孙潇莹,李劲劲,王雪深,陈建,高鹤,周哲海,徐骁龙. SiO2-SiNX体系光学谐振腔对Ti超导薄膜特性的研究[J]. 计量学报, 2023, 44(4): 549-554.
LIU Hai-yan,SUN Xiao-ying,LI Jing-jing,WANG Xue-shen,CHEN Jian,GAO He,ZHOU Zhe-hai,XU Xiao-long. Research on the Properties of Ti Superconducting Thin Films in SiO2-SiNx System Optical Resonator. Acta Metrologica Sinica, 2023, 44(4): 549-554.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2023.04.09 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2023/V44/I4/549

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