宽频带电磁式角振动校准系统研究进展

doi:10.3969/j.issn.1000-1158.2021.10.11

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摘要在分析激光干涉测量法基础上,阐述了Ａ类和Ｂ类激光干涉角振动测量的系统组成、测量原理、数据处理和测量范围,特别指出角振动台性能直接影响角振动校准结果。在此基础上,分析了角振动台国内外研究现状,指出各种类型的性能参数、应用范围和局限性。建立了宽频带角振动台的机电耦合方程,对其所涉及的高扭振频率运动部件设计技术、强而均匀气隙磁场磁路结构设计技术及可调电粘弹性支撑装置设计技术等关键技术进行了深入分析,并给出了相应的研究思路和建议。

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	唐波
	何闻
	刘爱东

关键词 ：计量学, 角振动传感器, 角振动台, 激光干涉仪, 校准装置

Abstract：On the basis of analyzing laser interferometry, the system composition, principle of measurement, data processing and measurement range for the angular vibration measurement method of A-type and B-type laser interferometry are described systematically, and it is especially pointed out that the performance of angular vibrators directly affects the angular vibration calibration result. On this basis, the research status and progress of angular vibrators are analyzed at home and abroad, and the specifications, application scopes and limitations of different types are pointed out. Finally, the electromechanical coupling equation of broadband angular vibrators is established, and the key techniques involved, such as design technology of a moving component with high torsional resonant frequency, design technology of a magnetic circuit structure with strong and uniform air gap magnetic field and design technology of an adjustable electro-viscoelastic-support device, are analyzed in depth, and the corresponding research ideas and suggestions are given.

Key words： metrology angular vibration transducers angular vibrator laser interferometry calibration device

收稿日期: 2020-01-09 发布日期: 2021-10-18

PACS:	TB936
	TM359.9

基金资助:国家重点研发计划(2019YFC1509503);国家自然科学基金(11872061);浙江省自然科学基金(LY21E050017);国家市场监督管理总局科技计划(2019MK103,2020MK189)

通讯作者: 何闻(1969-),男,安徽马鞍山人,浙江大学教授,博士,博士研究生导师,博士后合作导师,主要从事振动计量和振动控制技术研究。Email:hewens@zju.edu.cn E-mail: hewens@263.net

作者简介: 唐波(1985-),男,浙江余姚人,中国计量大学讲师,博士,浙江大学博士后,主要从事振动计量及振动测试技术研究。Email:tang-bo001@163.com

引用本文:

唐波,何闻,刘爱东. 宽频带电磁式角振动校准系统研究进展[J]. 计量学报, 2021, 42(10): 1328-1334.
TANG Bo,HE Wen,LIU Ai-dong. Research Progress on Broadband Electromagnetic Angular Vibration Calibration System. Acta Metrologica Sinica, 2021, 42(10): 1328-1334.

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