高线性度的二维无耦合纳米压电位移系统设计

罗四维; 乐燕芬; 彭洋; 吴俊杰; 雷李华; 张波; 金涛

doi:10.3969/j.issn.1000-1158.2021.08.01

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计量学报 ›› 2021, Vol. 42 ›› Issue (8) : 977-985. DOI: 10.3969/j.issn.1000-1158.2021.08.01

几何量计量

高线性度的二维无耦合纳米压电位移系统设计

罗四维¹,乐燕芬¹,彭洋¹,吴俊杰²,雷李华²,张波²,金涛¹

作者信息 +

Design of a High Linearity Two-Dimensional Uncoupled Nanometer Piezoelectric Displacement System

LUO Si-wei¹,LE Yan-fen¹,PENG Yang¹,WU Jun-jie²,LEI Li-hua²,ZHANG Bo²,JIN Tao¹

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文章历史 +

摘要

设计了一套具有高线性度的二维无耦合纳米压电位移系统。提出了一种多个压电陶瓷同步线性操作的电荷控制方案,设计采用基于非线性反馈控制和相似控制相结合的具有接地配置功能的压电控制器。控制器中引入了T型电阻网络,使电容较小的压电致动器能够进行低频线性操作。并对压电陶瓷驱动的位移平台进行了机械结构设计,平台采用嵌套式串联结构来避免耦合位移。通过解析法和ANSYS Workbench有限元仿真两方面对位移平台进行了刚度及位移分析。搭建了一套干涉位移测量系统,对压电位移台的位移、耦合误差及线性度进行了验证测试。实验结果表明:系统满行程内二维位移台的耦合误差最大仅为0.098%,可以将迟滞不对称引起的剩余轨迹偏差减小到0.79%,两个压电陶瓷间的最大轨迹偏差仅为行程范围的0.23%,理论分析和实验验证了所设计多压电电荷控制器的可行性,且系统可有效抑制耦合位移并使定位精度得到明显提高。

Abstract

A set of two-dimensional uncoupled nano-piezo displacement system with high linearity is designed. A charge control scheme for simultaneous linear operation of multiple piezoelectric actuators is proposed. The piezoelectric controller with ground configuration function. A T-shaped resistance network is introduced into the controller, which enables piezoelectric actuators with small capacitance to perform low-frequency linear operation. The mechanical structure of the displacement platform driven by piezoelectric ceramics is designed. The platform adopts a nested series structure to avoid coupling displacement. The stiffness and displacement analysis of the displacement platform are carried out through analytical methods and ANSYS Workbench finite element simulation. A set of interference displacement measurement system is built to verify the displacement, coupling error and linearity of the piezoelectric displacement stage. The experimental results show that the coupling error of the two-dimensional stage within the full stroke of the system is only 0.098% at the maximum, and the remaining trajectory deviation caused by hysteresis asymmetry can be reduced to 0.79%. The theoretical analysis and experiments verify the designed two-dimensional pressure. The electric displacement system can effectively suppress the coupling displacement and the positioning accuracy has been significantly improved.

导出引用

罗四维,乐燕芬,彭洋,吴俊杰,雷李华,张波,金涛. 高线性度的二维无耦合纳米压电位移系统设计[J]. 计量学报. 2021, 42(8): 977-985 https://doi.org/10.3969/j.issn.1000-1158.2021.08.01

LUO Si-wei,LE Yan-fen,PENG Yang,WU Jun-jie,LEI Li-hua,ZHANG Bo,JIN Tao. Design of a High Linearity Two-Dimensional Uncoupled Nanometer Piezoelectric Displacement System[J]. Acta Metrologica Sinica. 2021, 42(8): 977-985 https://doi.org/10.3969/j.issn.1000-1158.2021.08.01

中图分类号： TB92

参考文献

［1］Yang C, Li C, Xia F, et al. Charge Controller With Decoupled and Self-Compensating Configurations for Linear Operation of Piezoelectric Actuators in a Wide Bandwidth［J］. IEEE Transactions on Industrial Electronics, 2019, 66(7): 5392-5402.
［2］金涛, 唐一揆, 乐燕芬, 等. 一种单频激光干涉仪非线性误差修正方法研究［J］. 计量学报, 2020,41(6): 676-681.
Jin T, Tang Y ki, Le Y F, et al. A Research on Correction Method of Nonlinear Errors for Homodyne Laser Interferometer［J］. Acta Metrologica Sinica, 2020,41(6): 676-681.
［3］Zhu W L, Zhu Z, Shi Y, et al. Design, modeling, nanalysis and testing of a novel piezo-actuated XY compliant mechanism for large workspace nano-positioning［J］. Smart Materials and Structures, 2016, 25(11): 115033.
［4］Kang B W, Kim J. Design, Fabrication, and Evaluation of Stepper Motors Based on the Piezoelectric Torsional Actuator［J］. IEEE/ASME Transactions on Mechatronics, 2013, 18(6): 1850-1854.
［5］杨晓京, 彭芸浩, 李尧. 压电微位移台的动态迟滞建模及实验验证［J］. 光学精密工程, 2016, 24(9): 2255-2261.
Yang X J, Peng Y H, Li Y. Dynamic hysteresis modeling and experimental verification of piezoelectric positioning stage［J］. Optics and Precision Engineering, 2016, 24(9): 2255-2261.
［6］Hosseini N, Nievergelt A P, Adams J D, et al. A monolithic MEMS position sensor for closed-loop high-speed atomic force microscopy［J］. Nanotechnology, 2016, 27(13): 135705.
［7］周奇, 刘炳锋, 连笑怡, 等. 大范围二维纳米位移台的控制及非线性校准的实验研究［J］. 计量学报, 2018, 39(6): 21-26.
Zhou Q, Liu B F, Lian X Y, et al. Experimental Research on the Control and Non-linear Calibration of Large-scale Two-dimensional Nanometer Displacement Stage［J］. Acta metrologica Sinica, 2018, 39(6): 21-26.
［8］Fleming A J, Leang K K. Design, modeling and control of nanopositioning systems | NOVA. The University of Newcastles Digital Repository［J］. Advances in Industrial Control, 2014.
［8］Fleming A J, Leang K K. Design, modeling and control of nanopositioning systems［M］. Callaghan, Australia:University of Newcastle's Digital Repository, 2014.
［9］Janaideh M A, Krejci P, et al. Inverse Rate-Dependent Prandtl-Ishlinskii Model for Feedforward Compensation of Hysteresis in a Piezomicropositioning Actuator［J］.
IEEE/ASME Transactions on Mechatronics
, 2013, 18(5): 1498-1507.
［10］Gu G Y, Zhu L M, Su C Y. Modeling and Compensation of Asymmetric Hysteresis Nonlinearity for Piezoceramic Actuators With a Modified Prandtl-Ishlinskii Model［J］. IEEE Transactions on Industrial Electronics, 2014, 61(3): 1583-1595.
［11］Fleming A J, Moheimani S O R. A grounded-load charge amplifier for reducing hysteresis in piezoelectric tube scanners［J］. Review of Scientific Instruments, 2005, 76(7): 1688-2128.
［12］Fleming A J. Charge drive with active DC stabilization for linearization of piezoelectric hysteresis［J］. IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control, 2013, 60(8): 1630-1637.
［13］Tang H, Gao J, Chen X, et al. Development and Repetitive-Compensated PID Control of a Nanopositioning Stage With Large-Stroke and Decoupling Property［J］. IEEE Transactions on Industrial Electronics, 2018, 65(5): 3995-4005.
［14］Yang S, Chen W, Liu J, et al. Design, analysis and testing of a novel decoupled 2-DOF flexure-based micropositioning stage［J］. Journal of Micromechanics and Microengineering, 2017, 27(9): 095010.
［15］施玉书, 张树, 连笑怡, 等. 毫米级纳米几何特征尺寸计量标准装置多自由度激光干涉计量系统［J］. 计量学报, 2020, 41(7): 699-774.
Shi Y S, Zhang S, Lian X Y, et al. Multi-DOF Laser Interferometry System for Metrological Standard Device for Nano-geometrical Characteristic Size in Millimeter Range［J］. Acta metrologica Sinica, 2020, 41(7): 699-774.
［16］Poik M, Kohl D, Schitter G. Similarity-based Feedback Control for Linear Operation of Piezoelectric Actuators［C］//IEEE. IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM). Auckland, New Zealand, 2018: 97-102.
［17］Yang C, Li C, Zhao J. A Nonlinear Charge Controller with Tunable Precision for Highly Linear Operation of Piezoelectric Stack Actuators［J］. IEEE Transactions on Industrial Electronics, 2017, 64(11): 8618-8625.
［18］于靖军, 郝广波, 陈贵敏, 等. 柔性机构及其应用研究进展［J］. 机械工程学报, 2015, 51(13): 53-68.
Yu J J, Hao G B, Chen G M, et al. State-of-art of Compliant Mechanisms and Their Applications［J］. Journal of mechanical engineering, 2015, 51(13): 53-68.