压缩热效应对单晶硅密度测量的影响

doi:10.3969/j.issn.1000-1158.2020.12.10

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摘要为了探究压缩热效应对近单晶硅液体(DSL-2329)温度的影响,可采用理论推导与实验结果相结合的方式分析计算DSL-2329液体恒温压缩系数与恒熵压缩系数的比值,比值越大,则液体温度对压强越敏感。在0.1mK的恒温液体测量环境中,通过对液体温度与所受压强的微量调节,实现单晶硅球特定的3种悬浮状态,这3种状态之间包括液体密度分别在恒温与恒熵条件下的变化过程,利用这3种特定悬浮状态之间的压强关系计算出液体等温压缩系数与等熵压缩系数的比值。实验数据表明,压强变化量越小,测得的恒熵压缩系数与液体恒温压缩系数的比值与理论值0.72越接近。

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	钟家栋
	孙斌
	赵玉晓
	马鑫钰
	张竟月
	张殿龙

关键词 ：计量学, 密度测量, 静力悬浮法, 单晶硅密度, 压缩热效应

Abstract：In order to explore the influence of compression heat effect on the temperature of DSL-2329 liquid, the ratio of constant temperature compression coefficient to constant entropy compression coefficient of DSL-2329 liquid can be calculated by combining theoretical deduction with experimental results. The higher the ratio, the more sensitive the temperature of liquid to pressure. In a constant temperature liquid measuring environment of (+0.1mK), three specific suspension states of single crystal silicon sphere are realized by micro-adjustment of liquid temperature and pressure. The three states include the change of liquid density under constant temperature and constant entropy conditions respectively. The ratio of liquid isothermal compression coefficient to isentropic compression coefficient is calculated by using the pressure relationship between the three specific suspension states value. The experimental data show that the smaller the pressure change is, the closer the ratio of constant temperature compression coefficient to constant entropy compression coefficient is to the theoretical value of 0.72.

Key words： metrology density measurement static suspension method density of single crystal silicon compression heat effect

收稿日期: 2019-04-18 发布日期: 2020-12-08

PACS:

TB933

作者简介: 钟家栋(1993-), 男, 浙江绍兴人, 中国计量大学在读硕士研究生, 研究方向为微小容量检测。Email: 1063067917@qq.com

引用本文:

钟家栋,孙斌,赵玉晓,马鑫钰,张竟月,张殿龙. 压缩热效应对单晶硅密度测量的影响[J]. 计量学报, 2020, 41(12): 1505-1509.
ZHONG Jia-dong,SUN Bin,ZHAO Yu-xiao,MA Xin-yu,ZHANG Jing-yue,ZHANG Dian-long. Density Measurement of Monocrystalline Silicon Based on Compression Heat Effect. Acta Metrologica Sinica, 2020, 41(12): 1505-1509.

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