Design and Experimental Verification of Positioning Platform for Double-probe Atomic Force Microscopy
LIN Zhi-dong1,2,GAO Si-tian2,HUANG Lu2,LI Qi2
1. Collage of Mechanical Eng & Autom,Zhejiang Sci-Tech University, Hangzhou, Zhejiang 310018, China
2. National Institute of Metrology, Beijing 100029, China
Abstract：A large-stroke positioning platform that provides precise displacement is designed for the needs of dual-probe atomic force microscopy. A flexible hinge and a piezoelectric actuator are respectively used as a guiding mechanism and a driving mechanism of the positioning platform. The X,Y,and Z axis motion directions are independently displaced by a parallel mechanism. Mathematical modeling of the positioning platform,analysis and calculation of the working stiffness and natural frequency of the positioning platform,and finite element simulation analysis. Mathematical modeling of the positioning platform is carried out, the working stiffness and natural frequency of the positioning platform are analyzed and calculated, and the finite element simulation analysis is carried out. The experimental devices of the positioning platform are constructed with the capacitive sensor as the displacement measuring unit,and the experimental verification is carried out. Experimental results show that the positioning platform has a travel distance of 110μm in the X and Y axis directions with a resolution of 5nm,and a travel distance of 45μm in the Z axis direction with a resolution of 5nm.
［1］王伯雄, 陈非凡, 董瑛. 微纳米测量技术 ［M］. 北京: 清华大学出版社, 2006.
［2］常旭, 高思田, 施玉书, 等. 用于紫外光学显微镜的二维纳米位移台的设计及实验验证 ［J］. 计量学报, 2017, 38 (Z1): 29-34.
Chang X, Gao S T, Shi Y S, et al. Design and Exp-eriment Verification of Two Dimensional Nanometer Displacement Stage for Ultraviolent Microscope ［J］. Acta Metrologica Sinica, 2017, 38 (Z1): 29-34.
［3］Tsunemi E, Kobayashi K, Matsushige K, et al. Deve-lopment of dualprobe atomic force microscopy system us-ing optical beam deflection sensors with obliquely incident laser beams ［J］. Review of Scientific Instruments, 2011, 82 (3): 82-91.
［4］杨文军, 胡迟, 刘晓军. 一种可溯源原子力探针显微镜 ［J］. 计量学报, 2019, 40 (2): 183-188.
Yang W J, Hu C, Liu X J. A Traceable Atomic Force Microscope［J］. Acta Metrologica Sinica, 2019, 40 (2): 183-188.
［5］Mancevski V, Mcclure P F. Development of a dual-probe Caliper CD-AFM for near model-independent nanometr-ology ［J］. The International Society for Optical Enginee-ring, 2002, 4689: 83-91.
［6］王龙龙. 双探针原子力显微镜测量系统开发 ［D］. 天津:天津大学, 2014.
［7］张华坤. 用于线宽测量的双探针原子力显微镜对准系统研究 ［D］. 合肥:合肥工业大学, 2014.
［8］Saikumar N, Sinha R K, HosseinNia S H. Resetting disturbance observers with application in compensation of bounded nonlinearities like hysteresis in piezo-actuators ［J］. Control Engineering Practice,2019, 82 (1): 36-49.
［9］张雁南. 压电陶瓷微定位平台迟滞建模及自适应控制方法研究 ［D］. 长春: 吉林大学, 2019.
［10］刘鑫, 李新阳, 杜睿. 压电陶瓷驱动器迟滞非线性建模及逆补偿控制［J］. 光电工程, 2019, 46 (8): 25-32.
Liu X, Li X Y, Du R.Hysteresis nonlinear modeling and inverse compensation of piezoelectric actuators ［J］. Opto-Electronic Engineering, 2019, 46 (8), 25-32.
［11］吴鹰飞, 周兆英. 超精密定位工作台 ［J］. 微细加工技术, 2002, 2 (1): 41-47.
Wu Y F, Zhou Z Y.Ultra Precision Stages. Microf-abrication Technology, 2002, 2 (1): 41-47.
［12］Jones K E, Hunt M A, Martin C T, et al. Controlled Pedicle Subtraction Osteotomy Site Closure Using Flexible Hinge-Powered Operating Table ［J］. Operative Neurosurgery, 2019, 17 (5): 214-218.
［13］李庆祥, 王东生, 李玉和. 现代精密仪器设计 ［M］. 北京: 清华大学出版社, 2004.
［14］Awtar S, Parmar G. Design of a large range XY nanopo-sitioning system ［J］. Journal of Mechanisms and Robo-tics, 2013, 5 (2): 8-18.
［15］张菡, 薄涵亮, 王帅, 等. 电容式位移传感器的非线性拟合比较 ［J］. 电子技术应用, 2019, 45 (9): 89-92.
Zhang H, Fu H L, Wang S, et al. Comparison of Nonlinear Fitting of Capacitive Displacement Sensors ［J］. Application of Electronic Technique, 2019, 45 (9): 89-92.
［16］Yu Z C, Peng K, Liu X K, et al. A new capacitive long-range displacement nanometer sensor with different-ial sensing structure based on time-grating ［J］. Measu-rement Science and Technology, 2018, 29 (5): 9-13.
［17］曾涛, 鲁云峰, 张钟华, 等. 线面式电容传感器结构设计与传感特性研究 ［J］. 计量学报, 2019, 40 (6): 941-945.
Zeng T, Lu Y F, Zhang Z H, et al. Research in the Structure Design and Sensing Characteristics of the Filament-surface Capacitive Sensor ［J］. Acta Metrologica Sinica, 2019, 40 (6): 941-945.
2020, Vol. 41 
