利用微米划痕研究TiN涂层的失效机理

刘明; 李烁; 高诚辉

doi:10.3969/j.issn.1000-1158.2020.06.11

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计量学报 ›› 2020, Vol. 41 ›› Issue (6) : 696-703. DOI: 10.3969/j.issn.1000-1158.2020.06.11

力学计量

利用微米划痕研究TiN涂层的失效机理

刘明,李烁,高诚辉

作者信息 +

Study of Failure Mechanism of TiN Coatings by Micro-scratch Testing

LIU Ming,LI Shuo,GAO Cheng-hui

Author information +

文章历史 +

摘要

利用微米划痕仪和扫描电子显微镜,研究了TiN涂层的失效过程,分析了摩擦系数波动的机理,并评估了涂层的断裂韧性。结果表明:低载荷阶段,TiN涂层发生剪切滑移,划痕轨迹边缘出现了由反向V形裂纹到平行裂纹,再到正向V形裂纹的裂纹形式转变;随着法向载荷的增大,TiN涂层发生阶梯式剥落。摩擦系数的波动主要由于表面形貌和涂层失效的影响,不同的加载方式,摩擦系数有一定差别。采用微米划痕可以较准确地测试TiN涂层的断裂韧性,与压痕断裂法和有限元模拟法的测试结果相吻合。

Abstract

The failure process of TiN coating was studied by micro-scratch and scanning electron microscope, the mechanism of friction coefficient fluctuation was analyzed and the fracture toughness of the coating was evaluated. The results show that at low load stage, the TiN coating undergoes shear slip, and the edge of the scratch track appears from the reverse V-shaped crack to the parallel crack, and then to the forward V-shaped crack; as the normal load increases, the TiN coating undergoes stepwise spalling. Fluctuations in the coefficient of friction are mainly due to surface topography and coating failure, different loading methods have different friction coefficients. The fracture toughness of the TiN coating can be tested accurately with micro-scratches, which is consistent with the test results of the indentation fracture method and the finite element simulation method.

导出引用

刘明,李烁,高诚辉. 利用微米划痕研究TiN涂层的失效机理[J]. 计量学报. 2020, 41(6): 696-703 https://doi.org/10.3969/j.issn.1000-1158.2020.06.11

LIU Ming,LI Shuo,GAO Cheng-hui. Study of Failure Mechanism of TiN Coatings by Micro-scratch Testing[J]. Acta Metrologica Sinica. 2020, 41(6): 696-703 https://doi.org/10.3969/j.issn.1000-1158.2020.06.11

中图分类号： TB93

参考文献

［1］Ma L W, Cairney J M, Hoffman M, et al. Deformation mechanisms operating during nanoindentation of TiN coatings on steel substrates［J］. Surface & Coatings Technology, 2005, 192(1): 11-18.
［2］Li M C, Luo S Z, Zeng C L, et al. Corrosion behavior of TiN coated type 316 stainless steel in simulated PEMFC environments［J］. Corrosion Science, 2004, 46(6): 1369-1380.
［3］何志坚, 周志雄, 黄向明. 基于变分模态分解的关联维数及相关向量机的刀具磨损状态监测［J］. 计量学报, 2018, 39(2): 182-186.
He Z J, Zhou Z X, Huang X M. Tool Wear State Monitoring Based on Variational Mode Decomposition and Correlation Dimension and Relevance Vector Machine［J］. Acta Metrologica Sinica, 2018, 39(2): 182-186.
［4］朱坚民, 战汉, 张统超, 等. 基于切削声发射信号测量的刀具磨损状态判别［J］. 计量学报, 2015, 36(3): 268-272.
Zhu J M, Zhan H, Zhang T C, et al. Tool Wear State Recognition Based on Cutting Acoustic Emission Signal Measurement［J］. Acta Metrologica Sinica, 2015, 36(3): 268-272.
［5］朱光宇, 董翔宇, 高诚辉, 等. 试样倾斜对熔融石英硅三棱锥纳米压痕测试的影响［J］. 计量学报, 2019, 40(2): 289-294.
Zhu G Y, Dong X Y, Gao C H, et al. Effects of Sample Tilt on Berkovich Nanoindentation Test of Fused Silica［J］. Acta Metrologica Sinica, 2019, 40(2): 289-294.
［6］黎正伟, 陶兴付, 树学峰, 等. 纳米压痕仪的压头面积函数校准方法的比较研究［J］. 计量学报, 2015, 36(4): 403-407.
Li Z W, Tao X F, Shu X F, et al. Comparative Study on the Calibration Methods of the Indenter Area Function of the Instrumented Nanoindentation［J］. Acta Metrologica Sinica, 2015, 36(4): 403-407.
［7］王新伟, 陶兴付, 李旭, 等. 极浅压入下纳米压痕仪针尖面积函数校准方法的研究［J］. 计量学报, 2017, 38(5): 593-597.
Wang X W, Tao X F, Li X, et al. Study on the Calibration Method of the Tip Area Function of the Nanoindenter at Super Low Depth［J］. Acta Metrologica Sinica, 2017, 38(5): 593-597.
［8］Gao C, Liu M. Instrumented indentation of fused silica by Berkovich indenter［J］. Journal of Non-Crystalline Solids, 2017, 475(1): 151-160.
［9］Liu M, Proudhon H. Finite element analysis of contact deformation regimes of an elastic-power plastic hardening sinusoidal asperity［J］. Mechanics of Materials, 2016, 103: 78-86.
［10］Gao C, Liu M. Power law creep of polycarbonate by Berkovich nanoindentation［J］. Materials Research Express, 2017, 4(10): 105302.
［11］Hainsworth S V, Soh W C. The effect of the substrate on the mechanical properties of TiN coatings［J］. Surface and Coatings Technology, 2003, 163: 515-520.
［12］Larsson M, Olsson M, Hedenqvist P, et al. Mechanisms of coating failure as demonstrated by scratch and indentation testing of TiN coated HSS［J］. Surface Engineering, 2000, 16(5): 436-444.
［13］Kataria S, Kumar N, Dash S, et al. Evolution of deformation and friction during multimode scratch test on TiN coated D9 steel［J］. Surface & Coatings Technology, 2010, 205(3): 922-927.
［14］Wang M, Ma G, Liu X, et al. Morphology and Mechanical Properties of TiN Coatings Prepared with Different PVD Methods［J］. Rare Metal Materials & Engineering, 2016, 45(12): 3080-3084.
［15］Holmberg K, Laukkanen A, Ronkainen H, et al. A model for stresses, crack generation and fracture toughness calculation in scratched TiN-coated steel surfaces［J］. Wear, 2003, 254(3): 278-291.
［16］Huang L Y, Xu K W, Lu J. Evaluation of scratch resistance of diamond-like carbon films on Ti alloy substrate by nano-scratch technique［J］. Diamond & Related Materials, 2002, 11(8): 1505-1510.
［17］Holmberg K, Laukkanen A, Ronkainen H, et al. Tribological contact analysis of a rigid ball sliding on a hard coated surface: Part I: Modelling stresses and strains［J］. Surface & Coatings Technology, 2006, 200(12-13): 3793-3809.
［18］Bhowmick S, Xie Z H, Hoffman M, et al. Nature of contact deformation of TiN films on steel［J］. Journal of Materials Research, 2004, 19(9): 2616-2624.
［19］Bhowmick S, Kale A N, Jayaram V, et al. Contact damage in TiN coatings on steel［J］. Thin Solid Films, 2003, 436(2): 250-258.
［20］Zeng H, Wang H, Shen J. Mechanical properties of TiN coatings studied via nanoindentation and nanoscratch test［J］. Journal of Vacuum Science & Technology B, 2016, 34(2): 021802.
［21］Lafaye S, Troyon M. On the friction behaviour in nanoscratch testing［J］. Wear, 2006, 261(7): 905-913.
［22］Akono A T, Randall N X, Ulm F J. Experimental determination of the fracture toughness via microscratch tests: Application to polymers, ceramics, and metals［J］. Journal of Materials Research, 2012, 27(2): 485-493.
［23］Stallard J, Poulat S, Teer D G. The study of the adhesion of a TiN coating on steel and titanium alloy substrates using a multi-mode scratch tester ［J］. Tribology International, 2006, 39(2): 159-166.
［24］Beake B D, Liskiewicz T W, Smith J F. Deformation of Si(100) in spherical contacts — Comparison of nano-fretting and nano-scratch tests with nano-indentation［J］. Surface & Coatings Technology, 2011, 206(7): 1921-1926.
［25］Akono A T, Ulm F J. An improved technique for characterizing the fracture toughness via scratch test experiments［J］. Wear, 2014, 313(1-2): 117-124.
［26］Akono A T. Energetic size effect law at the microscopic scale: application to progressive-load scratch testing［J］. Journal of Nanomechanics and Micromechanics, 2016, 6(2): 04016001.
［27］Mofidi H H, Rouhaghdam A S, Ahangarani S, et al. Fracture Toughness of TiN Coating as a Function of Interlayer Thickness［J］. Advanced Materials Research, 2014, 829: 466-470.
［28］Chou W J, Yu G P, Huang J H. Mechanical properties of TiN thin film coatings on 304 stainless steel substrates［J］. Surface and Coatings Technology, 2002, 149(1): 7-13.