为了提高二维光栅系统的校准精度,建立了国家二维光栅校准标准装置并开展了试验研究。基于双轴正交激光干涉仪的二维光栅校准方法,建立了共平面运动结构的二维光栅校准试验装置,开发了基于C#的上位机自动控制测量程序实现自动校准;分析装置运动过程中几何误差对二维光栅校准结果的影响,提出角误差修正的黑箱模型,并使用MATLAB对安装平面作最小二乘拟合。
Abstract
In order to improve the calibration accuracy of two-dimensional grating measurement system, a study was carried out to establish a national standard device of two-dimensional grating calibration. A two-dimensional grating calibration method based on dual-axis orthogonal laser interferometer was studied, and a two-dimensional grating calibration experimental device of coplanar motion structure was established. A automatic control calibration program based on C# was developed to realize automatic calibration. The influences of two-dimensional grating installation error on the calibration result were analyzed. A black box model of angular error correction was proposed, and the working plane based on MATLAB least squares fitting algorithm was utilized.
关键词
计量学 /
二维光栅 /
双轴激光干涉仪 /
最小二乘平面拟合
Key words
metrology /
two-dimensional grating /
dual-axis laser interferometer /
least squares plane fitting
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基金
国家重点研发计划项目（2017YFF0204803）
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