Abstract:The surface quality of the ICF capsule, the key component of ICF test, is directly related to the success or failure of the ICF target test. In order to accurately measure the surface morphology and sphericity error of capsule, a five-axis coordinate measuring machine is designed and the laser probe based on conoscopic holography is used. Firstly, according to the structural characteristics of the capsule surface, the sphericity error evaluation algorithm based on least squares is improved.Then, the overall configuration of a five-axis coordinate measuring machine(CMM) is introduced as an experimental platform, the measurement mathematical model of the CMM is deduced. The points on the capsule surface can be collected under a variety of gestures in the non-contact way. Finally, under the same working condition, the results of the experiments show that the average value of sphericity error of capsule is 0.0021mm and its standard deviation is 2.07x10-4mm. The proposed method can meet the measurement requirement of high accuracy and high stability upon the sphericity error of capsule.