1.Institution of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei, Anhui 230009, China
2. BOE Technology Group Co. Ltd., Hefei, Anhui 230012,China
Abstract：During the on-line detection of liquid crystal glass plates, the distribution of the pressure and the velocity in the gas film flow field are required to be gentle and the stability. In order to compare the effects of different air-floating platforms on the stability of the gas film, combined with the gas lubrication theory, the pressure distribution of the stable gas film was obtained. The through holes were generally arranged in an array on the air floating plate. Gambit was used to mesh the three-dimensional model of the air-floating platform, and then introduced into the Fluent software to simulate the positive pressure air supply mode and the positive and negative pressure air supply mode. The distribution of the air buoyancy and velocity were obtained under two different air supply modes. From the above analysis, if the remaining variables in the air-floating system remain unchanged, the advantages of positive and negative pressure at the same time of gas supply are more obvious, and the air buoyancy and velocity distribution are smooth after the gas film is stabilized, and the mass flow rate of the required gas is less than that of the positive pressure. Based on the above research, a glass substrate optical defect detection prototype was fabricated by positive and negative pressure simultaneous gas supply. The experimental results show that the change of film gap is less than 1μm and the stability is good.
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2019, Vol. 40 
