1. National Institute of Metrology, Beijing 100029, China
2. School of Instrumentation Science and Opto-electronics Engineering, Beijing University of Information Science and Technology, Beijing 100192, China
Abstract：The standard devices for the WR-6 power standard were designed and fabricated. The micro-fabrication process was studied. The Pt film for temperature sensors was fabricated and the thermal annealing process was researched. After a annealing process at 250 ℃, the temperature coefficient of resistance (TCR) of the Pt film was 2.4×10-3/K and the relative stability was 2.4×10-6. The reflectivity of the device was below -23 dB for 110～170 GHz. The sensitivity for the DC power was 0.83 mΩ/mW.
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2019, Vol. 40 
