Abstract:Compared with the one-axial vibration excitation in the traditional calibration method, the triaxial standard vibration exciter can simulate the actual application environment of the calibrated accelerometer. The spatial response characteristic of the accelerometer can be obtained by using the triaxial standard vibration exciter to realize the accurate calibration of the accelerometer. The sensitivity matrix model of the triaxial accelerometer was proposed which used the bandpass based on heterodyne interferometry triaxial primary vibration calibration method and the theory of the acceleration vector. This method realizes the calibration of the accelerometer by calculating its sensitivity matrix. The experimental results show that this method can simultaneously realize the high precise calibration of the principal and the transverse sensitivities of the triaxial accelerometer, and this method can effectively reduce the calibration time and the error caused by the repetitive installations.
杨明,蔡晨光,刘志华,王颖. 基于外差激光干涉法的三轴向振动绝对校准方法研究[J]. 计量学报, 2018, 39(2): 201-206.
YANG Ming,CAI Chen-guang,LIU Zhi-hua,WANG Ying. Research on the Method of the Triaxial Primary Vibration Calibration Using the Heterodyne Interferometry. Acta Metrologica Sinica, 2018, 39(2): 201-206.
[1]于梅. 三轴向振动加速度校准系统的研究[J]. 计量学报, 2010, 31(6): 517-519.
[2]Tsuchiya T, Tabata O, Umeda A. Dynamic sensitivity matrix measurement for single-mass SOI 3-axis accelerometer[C]// IEEE, International Conference on MICRO Electro Mechanical Systems. IEEE, 2012: 420-423.
[3]何懿才, 廖建平, 赵君辙. 数学摆台法的超低频加速度校准[J]. 计量学报, 2017, 38(4): 424-428.
[4]ISO 16063-11, Methods for the calibration of vibration and shock transducers-Part 11: Primary vibration calibration by laser interferometry[S]. 1999.
[5]于梅, 孙桥. 外差式激光干涉仪应用于正弦直线和旋转振动测量技术的研究[J]. 计量学报, 2005, 26(3): 237-241.
[6]王月兵, 孙旭鹏, 姚磊, 等. 激光测振仪校准方法研究进展与评述[J]. 中国计量学院学报, 2015, 26(4): 399-405.
[7]ISO/DIS 16063-31, Methods for the calibration of vibration and shock transducers-Part 31: Testing of transverse vibration sensitivity [S]. 2009.
[8]Umeda A, Onoe M, Sakata K, et al. Calibration of three-axis accelerometers using a three-dimensional vibration generator and three laser interferometers[J]. Sensors & Actuators A Physical, 2004, 114(1): 93-101.
[9]Usuda T, Weienborn C, Von Martens H. Theoretical and experimental investigation of transverse sensitivity of accelerometers under multiaxial excitation[J]. Measurement Science & Technology, 2004, 15(5): 896-904.
[10]Tsuchiya T, Tabata O, Umeda A. Dynamic sensitivity matrix measurement for single-mass SOI 3-axis accelerometer [C]// IEEE, International Conference on MICRO Electro Mechanical Systems. IEEE, 2012: 420-423.
[11]SUN Q, Bruns T, Tubner A, et al. Modifications of the sine-approximation method for primary vibration calibration by heterodyne interferometry[J]. Metrologia, 2009, 46(6): 646-654.
[12]Betta G, Capriglione D, Ferrigno L, et al. Innovative methods for the selection of bandpass sampling rate in cost-effective RF measurement instruments[J]. Measurement, 2010, 43(8): 985-993.
[13]Boute R. The Geometry of Bandpass Sampling: A Simple and Safe Approach[J]. IEEE Signal Processing Magazine, 2012, 29(4): 90-96.
[14]LIU J H, ZHOU X Y, PENG Y G. Spectral arrangement and other topics in first-order bandpass sampling theory[J]. IEEE Transactions on Signal Processing, 2001, 49(6): 1260-1263.
[15]YANG P, XING G Z, HE L B. Calibration of high-frequency hydrophone up to 40 MHz by heterodyne interferometer[J]. Ultrasonics, 2014, 54(1): 402-407.
[16]ISO 16063-41, Methods for the calibration of vibration and shock transducers: Part 41: Calibration of laser vibrometers[S]. 2011.