接触式表面轮廓测量仪的非线性误差分析与补偿

孙艳玲; 常素萍

doi:10.3969/j.issn.1000-1158.2016.06.03

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计量学报 ›› 2016, Vol. 37 ›› Issue (6) : 563-566. DOI: 10.3969/j.issn.1000-1158.2016.06.03

几何量计量

接触式表面轮廓测量仪的非线性误差分析与补偿

孙艳玲^1,2,常素萍³

作者信息 +

Analysis and Compensation of the Nonlinear Error Based on Contact Surface Profil Measurement

SUN Yan-ling^1,2,CHANG Su-ping³

Author information +

文章历史 +

摘要

测量触针随杠杆绕支点转动产生圆弧轨迹,其水平方向位移偏差会对大量程接触式表面轮廓测量形成误差。在改进传统测杆结构的基础上,建立了测量结果的非线性误差数学模型,推导出多项式拟合误差的补偿算法。提出了拟合标准球计算误差补偿参数的方法。通过对半径为79.505 3 mm的球冠测量,得到半径尺寸误差小于1 μm,实验证明了取得了较好的补偿效果。

Abstract

A circular path is produced by measuring stylus rotating with the lever axle, and the horizontal deviation affects the accuracy of surface profile measurements. Based on the improvement of traditional measuring rod, the mathematical model of non-linear measurement error and the compensation algorithm of polynomial fitting error are derived. The method of calculating error compensation parameters by fitting a standard ball is proposed. For a spherical cap of 79.505 3 mm radius, experimental results shown that the size of the radius error is less than 1 μm, the effect of the compensation is better.

导出引用

孙艳玲,常素萍. 接触式表面轮廓测量仪的非线性误差分析与补偿[J]. 计量学报. 2016, 37(6): 563-566 https://doi.org/10.3969/j.issn.1000-1158.2016.06.03

SUN Yan-ling,CHANG Su-ping. Analysis and Compensation of the Nonlinear Error Based on Contact Surface Profil Measurement[J]. Acta Metrologica Sinica. 2016, 37(6): 563-566 https://doi.org/10.3969/j.issn.1000-1158.2016.06.03

中图分类号： TB92

参考文献

［1］Lee C K. Diferential laser interferometer for nanometer displacement measurement ［J］. AIAA Journal, 1995, 33(9):1675-1680.
［2］Bowen D K, et al. Sub-nanometer Transducer characterization by X-ray interferometry［J］.Precision Engineering, 1990, 12(3):165-173.
［3］Bobroff N. Recent advances in displacement measuring interferometry［J］. Meas Sci Technol, 1995, 4(9): 907-26.
［4］Brand U, Hermann K. A laser measurement system for the high-precision calibration of displacement transducers［J］. Meas Sci Technol, 1996, 7(6): 911-917.
［5］Rank Taylor Hobson Ltd. The Form Talysurf Series 2 Operator’s Handbook (Leicester: Rank Taylor Hobson) Publication no K505/9［Z］, 1996.
［6］Chang-Ock Lee, Kilsu Park, Byong Chon Park, et al. An algorithm for stylus instruments to measure aspheric surfaces［J］. Meas Sci Technol, 2005,3(16):1215-1222.