2025年04月04日 星期五 首页   |    期刊介绍   |    编 委 会   |    投稿指南   |    期刊订阅   |    统合信息   |    联系我们
计量学报  2024, Vol. 45 Issue (3): 305-310    DOI: 10.3969/j.issn.1000-1158.2024.03.01
  几何量计量 本期目录 | 过刊浏览 | 高级检索 |
2~10μm台阶高度标准物质候选物的研制和质量评价
柳迪1,3,王琛英2,3,张雅馨1,3,王云祥4,王松1,3,陈伦涛1,3,王永录3,朱楠3,蒋庄德1,3
1.西安交通大学机械工程学院,陕西西安710049
2.西安交通大学仪器科学与技术学院,陕西西安710049
3.西安交通大学机械制造系统工程国家重点实验室,陕西西安710049
4.苏州计量测试院,江苏苏州215128
Fabrication and Quality Evaluation of 2~10μm Step Height Reference Material Candidates
LIU Di1,3,WANG Chenying2,3,ZHANG Yaxin1,3,WANG Yunxiang4,WANG Song1,3,CHEN Luntao1,3,WANG Yonglu3,ZHU Nan3,JIANG Zhuangde1,3
1. School of Mechanical Engineering, Xi′an Jiaotong University, Xi′an, Shaanxi 710049, China
2. School of Instrument Science and Technology, Xi′an Jiaotong University, Xi′an, Shaanxi 710049, China
3. State Key Laboratory for Manufacturing Systems Engineering, Xi′an Jiaotong University,Xi′an, Shaanxi 710049, China
4. Suzhou Institute of Metrology, Suzhou, Jiangsu 215128, China
全文: PDF (499 KB)   HTML (1 KB) 
输出: BibTeX | EndNote (RIS)      
摘要 微米台阶高度标准物质用于校准仪器z轴性能,传递准确的微米高度量值。利用光刻结合干法刻蚀工艺实现公称高度为2,5,10μm台阶高度标准物质候选物的制备,并对台阶高度、粗糙度和上下表面平行度进行表征。使用激光共聚焦显微镜和非球面测量仪进行测量,基于双边算法、直方图法、ISO算法和光学显微解耦合准则(LEL)法对台阶高度进行评定,对于同一标准物质候选物各评定方法间的标准差均不超过0.024μm,台阶高度评定值的相对偏差均在5%以内,表明不同算法的评定结果一致性水平较高且量值可靠;不同仪器的评定结果对比,说明了评定方法之间也具有良好的一致性;同时,粗糙度不超过0.04μm,上下表面平行度不超过0.03°,验证了标准物质候选物制备效果良好。
服务
把本文推荐给朋友
加入我的书架
加入引用管理器
E-mail Alert
RSS
作者相关文章
柳迪
王琛英
张雅馨
王云祥
王松
陈伦涛
王永录
朱楠
蒋庄德
关键词 微米计量台阶高度标准物质干法刻蚀粗糙度平行度    
Abstract:The micrometer step height reference materials can used to calibrate the z-axis performance of the instrument and transmit accurate micrometer height values. The step height reference material candidates with 2,5,10μm nominal size are prepared by photolithography combined with dry etching. The height, roughness, and parallelism of the steps are characterized. Using a laser confocal microscope and an aspheric measuring instrument for measurement, the step height is evaluated based on the bilateral algorithm, histogram method, International Organization for Standardization (ISO algorithm, and the decoupling criterion for optical microscopy (LEL) method. For the same reference material candidates, the standard deviation between each evaluation method does not exceed 0.024μm. Moreover, the relative deviation of the step height evaluation values is within 5%. This indicates that the evaluation results obtained using different algorithms and instruments have a high level of consistency and reliable measurement values. The comparison of evaluation results from different instruments indicates that the evaluation methods also have good consistency. Meanwhile, the roughness does not exceed 0.04μm. The parallelism of the upper and lower surfaces does not exceed 0.03°, which verifies the good preparation effect of the reference material candidates.
Key wordsmicron metrology    step height reference material    dry etching    roughness    parallelism
收稿日期: 2023-09-19      发布日期: 2024-03-25
PACS:  TB92  
基金资助:国家自然科学基金(52175354)
通讯作者: 王琛英(1976-),陕西西安人,西安交通大学仪器科学与技术学院副研究员,从事微纳制造、微纳计量技术研究工作。Email:wangchenying@mail.xjtu.edu.cn     E-mail: wangchenying@xjtu.edu.cn
作者简介: 柳迪(2000-),新疆霍城人,西安交通大学硕士研究生,研究方向为微纳制造技术。Email:1540753952@qq.com
引用本文:   
柳迪,王琛英,张雅馨,王云祥,王松,陈伦涛,王永录,朱楠,蒋庄德. 2~10μm台阶高度标准物质候选物的研制和质量评价[J]. 计量学报, 2024, 45(3): 305-310.
LIU Di,WANG Chenying,ZHANG Yaxin,WANG Yunxiang,WANG Song,CHEN Luntao,WANG Yonglu,ZHU Nan,JIANG Zhuangde. Fabrication and Quality Evaluation of 2~10μm Step Height Reference Material Candidates. Acta Metrologica Sinica, 2024, 45(3): 305-310.
链接本文:  
http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2024.03.01     或     http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2024/V45/I3/305
京ICP备:14006989号-1
版权所有 © 《计量学报》编辑部
地址:北三环东路18号(北京1413信箱)  邮编:100029 电话:(010)64271480
本系统由北京玛格泰克科技发展有限公司设计开发  技术支持:support@magtech.com.cn