直线导轨滚转角测量误差自校正方法

doi:10.3969/j.issn.1000-1158.2022.12.02

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摘要提出一种具有滚转角测量自动校正功能的五自由度运动误差测量系统,解决了平行双光束法在测量滚转角误差时受光束平行度影响较大的问题。介绍了平行双光束法测量五自由度运动误差的原理,建立了关于双光束平行度误差与滚转角测量误差间的模型,提出了基于双自准直单元的双光束平行度误差测量方法。实验结果表明:双光束之间存在15.4″的平行度误差时,可以将滚转角测量误差的残差由44″减小到2.7″。该校正方法有效提高了双光束测量滚转角的准确性,可用于直线导轨运动误差的在线监测。

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	宋治崑
	张记云
	张汉平
	范宇超
	钱钧
	范光照
	娄志峰

关键词 ：计量学, 直线导轨, 滚转角误差, 双光束平行度, 双自准直单元, 误差补偿

Abstract：The precision of parallel dual-beam method is greatly affected by the beams’ parallelism when measuring a roll angle error, a five-degree-of-freedom motion error measurement system with self-correction function for roll angle measurement is proposed. The principle of a five-degree-of-freedom measuring system using double beam method is introduced, the model between double beam parallelism error and the roll angle measuring error is achieved, double autocollimator based method for monitoring the parallelism is proposed. The experimental results show that the residual error of the measured roll angle error can be reduced from 44″ to 2.7″ when a parallelism error of 15.4″ exists. The accuracy of the double-beam measurement for roll angle error has been improved effectively. The proposed method can be used to monitor the motion error of linear guides in real time.

Key words： metrology linear guides roll angle error dual beam parallelism double autocollimator error compensation

收稿日期: 2022-03-02 发布日期: 2022-12-28

PACS:

TB922

基金资助:江苏省政策引导类计划项目(BZ2020051);大连理工大学基本科研业务费项目(DUT21LAB109)

通讯作者: 娄志峰(1978-),男,黑龙江肇东人,大连理工大学副教授,从事微小组件自动装配技术、数控机床误差测量与补偿技术等方向的研究。Email: louzf@dlut.edu.cn E-mail: louzf@dlut.edu.cn

作者简介: 宋治崑(1997-),男,河南安阳人,大连理工大学硕士研究生,研究方向为直线运动轴光学测量。Email: zhikun_song@163.com

引用本文:

宋治崑,张记云,张汉平,范宇超,钱钧,范光照,娄志峰. 直线导轨滚转角测量误差自校正方法[J]. 计量学报, 2022, 43(12): 1538-1543.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2022.12.02 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2022/V43/I12/1538

［1］屈重年, 伍良生, 肖毅川, 等. 机床导轨技术研究综述［J］. 制造技术与机床, 2012(1): 30-36.
Qu C N, Wu L S, Xiao Y C, et al. Summary of guideway technology research on machine tools ［J］. Manufacturing Technology & Machine Tool, 2012(1): 30-36.
［2］范光照, 朱志良, 钟添东. 小型微/纳米级三坐标测量机的研制［J］. 纳米技术与精密工程, 2003, 1(1): 17-23.
Fan K C, Zhu Z L, Chen T D. Development of a Small Coordinate Measuring Machine with Micro/Nano-Accuracy ［J］. Nanotechnology and Precision Engineering, 2003, 1(1): 17-23.
［3］赵壮, 娄志峰, 张忠宁, 等. 符合阿贝原则的数控机床几何误差建模［J］. 光学精密工程, 2020, 28(4): 885-897.
Zhao Z, Lou Z F, Zhang Z N, et al. Geometric error model of CNC machine toolsbased on Abbe principle ［J］. Optics and Precision Engineering, 2020, 28(4): 885-897.
［4］李永祥, 焦万堂, 武文斌. 机床导轨误差对零件加工精度的影响［J］. 制造技术与机床, 2005(8): 82-85.
Li W X, Jiao Y T, Wu W B. Influence of Lathe Guide Errors on Machining Accuracy ［J］. Manufacturing Technology & Machine Tool, 2005(8): 82-85.
［5］李瑞君,李洁,何亚雄,等. 微纳米三坐标测量机三轴垂直度误差测量及建模补偿［J］. 计量学报, 2022, 43(4): 452-456.
Li R J,Li J,He Y X,et al. Error Measurement and Modeling Compensation of Three Axis Perpendicularity of Micro-nano CMM［J］. Acta Metrologica Sinica, 2022, 43(4): 452-456.
［6］施玉书, 张树, 连笑怡, 等. 毫米级纳米几何特征尺寸计量标准装置多自由度激光干涉计量系统［J］. 计量学报, 2020, 41(7): 769-774.
Shi Y S, Zhang S, Lian X Y, et al. Multi-DOF Laser Interferometry System for Metrological Standard Device for Nano-geometrical Characteristic Size in Millimeter Range［J］. Acta Metrologica Sinica, 2020, 41(7): 769-774.
［7］程真英,梅寒冰,刘欣,等. 收发分体式四自由度激光测量系统耦合误差建模与补偿［J］. 计量学报, 2021, 42(11): 1409-1417.
Cheng Z Y,Mei H B,Liu X, et al. Coupling Error Modeling and Compensation of Transceiver Split Laser Four-degree-of-freedom Error Measurement System［J］. Acta Metrologica Sinica,2021, 42(11): 1409-1417.

［5］赵东升, 张健, 贾敏强, 等. 测量数控机床定位误差的两种方法之比较［J］. 计量学报, 2019, 40(S1): 33-35.
Zhao D S, Zhang J, Jia m q, et al. Comparison of two methods for measuring the error of CNC machine tool ［J］. Acta Metrologica Sinica, 2019, 40(S1): 33-35.
［6］张馨龙, 田光宇, 黄勇. 三轴正交机器人运动误差的建模与分析［J］. 计量学报, 2017, 38(4): 396-401.
Zhang X L, Tian G Y, Huang Y. Modeling and analysis of movement error of three axis orthogonal robots ［J］. Acta Metrologica Sinica, 2017, 38(4): 396-401.
［8］匡萃芳, 冯其波, 刘斌. 滚转角测量方法综述［J］. 光学技术, 2004, 30(6): 699-702.
Kuang C F, Feng Q B, Liu B. Survey of rolling angle measurement methods ［J］. Optical Technique, 2004, 30(6): 699-702.
［9］句爱松, 侯文玖, 杨卫, 等. 改进型的滚转角测量干涉仪［J］. 中国激光, 2015, 42(7): 188-193.
Ju A S, Hou W J, Yang W, et al. Enhanced roll-angle measurement interferomerter ［J］. Chinese Journal of Lasers, 2015, 42(7): 188-193.
［10］侯文玖, 钟朝阳, 乐燕芬, 等. 高精度滚转角测量干涉仪［J］. 机械工程学报, 2014, 50(22): 22-27.
Hou W J, Zhong C Y, Le Y F, et al. High precision roll angle interferomerter ［J］. Journal of Mechanical En-gineering, 2014, 50(22): 22-27.
［11］陶卫, 浦昭邦, 张琢. 光栅楔形平板及其在转角测量中的应用［J］. 光电子·激光, 2002, 13(4): 371-373.
Tao W, Pu Z B, Zhuang Z T, et al. Grating wedge disk and its application in the measurement of rotating angle ［J］. Journal of Optoelectronics·Laser, 2002, 13(4): 371-373.
［12］蒋弘, 殷纯永. 一种测量滚转角的新方法［J］. 中国激光, 1999, 26(12): 1085-1089.
Jiang H, Yin C Y. A Novel Method to Measure the Roll Angle Using a Transverse Zeeman Laser ［J］. Chinese Journal of Lasers, 1999, 26(12): 1085-1089.
［13］杨志勇, 黄先祥, 周召发, 等. 方波磁光调制测量在航天器对接中的应用［J］. 光学精密工程, 2012, 20(8): 1732-1739.
Yang Z Y, Huang X X, Zhou Z F, et al. Application of square wave magneto-optic modulation to spacecraft docking ［J］. Optics and Precision Engineering, 2012, 20(8): 1732-1739.
［14］马军山, 王向朝, 方祖捷. 滚转角误差的光学精密测量技术研究［J］. 光学学报, 2000, 20(10): 1403-1406.
Ma J S, Wang X C, Fang Z J. Optical Precision Measurement Technique of Rolling Error ［J］. Acta Optica Sinica, 2000, 20(10): 1403-1406.
［15］Fan K C, Chen M J, Huang W M. A six-degree-of-freedom measurement system for the motion accuracy of linear stages ［J］. International Journal of Machine Tools & Manufacture, 1998, 38(3): 155-164.
［16］曹睿, 张斌, 冯其波, 等. 多自由度误差同时测量中的滚转角测量方法［J］. 光学学报, 2008, 28(12): 2344-2348.
Cao R, Zhang B, Feng Q B, et al. A method for roll-angle measurement in multi-degree-of-freedom measuring system ［J］. Acta Optica Sinica, 2008, 28(12): 2344-2348.
［17］Cai Y , Yang B, Fan K C. Robust roll angular error measurement system for precision machines ［J］. Optics Express, 2019, 27(6): 8027.
［18］张忠宁, 宋治崑, 范宇超, 等. 五自由度运动误差测量系统关键技术研究［J］. 计测技术, 2021, 41(3): 39-45.
Zhang Z N, Song Z K, Fan Y C, et al. Research on Key Technology of Five-degree-of-freedom Motion Error Measurement System ［J］. Metrology and Measurement Technology, 2021, 41(3): 39-45.