基于光谱共焦的在线集成表面粗糙度测量方法

doi:10.3969/j.issn.1000-1158.2021.06.10

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摘要为了提高加工检测效率,实现尺寸形位公差与微观轮廓的同平台测量,提出一种基于光谱共焦位移传感器在现场坐标测量平台上集成表面粗糙度测量的方法。搭建实验测量系统且在LabVIEW平台上开发系统的硬件通讯控制模块,并配套了高斯轮廓滤波处理及表面粗糙度的评价环境,建立了非接触的表面粗糙度测量能力。对标准台阶、表面粗糙度标准样块和曲面轮廓样品进行了测量,实验结果表明:该测量系统具有较高的测量精度和重复性,粗糙度参数Ra的测量重复性为0.0026μm,在优化零件检测流程和提高整体检测效率等方面具有一定的应用前景。

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	周勇
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	王震宏
	唐胜江

关键词 ：计量学, 表面粗糙度, 光谱共焦, 测量控制, 在线集成, 轮廓滤波器

Abstract：A method of on-line integration roughness measurement based on chromatic spectrum confocal is put forward for achieving the measurement of microcosmic profile synchronization with the dimensional and distortion tolerance,and improving the efficiency of machining and testing.The non-contact measurement ability is established by constructing the measuring system and integration the abilities of system communication control and Gaussian profile filtering on LabVIEW.The measurement results of the step height standards and roughness standard sample show that the system has a good measuring accuracy and repeatability.The measuring repeatability of the parameter Ra is 0.0026μm.It has a certain application prospect in optimizing measurement process and improving measuring efficiency.

Key words： metrology surface roughness chromatic confocal measurement control on-line Integration profile filter

收稿日期: 2020-02-17 发布日期: 2021-06-23

PACS:

TB92

基金资助:中国工程物理研究院材料研究所特聘人才基金(TP03201706)

通讯作者: 周勇 E-mail: zhouyong99@caep.cn

作者简介: 周勇(1991-),湖南常德人,中国工程物理研究院材料研究所特聘助理研究员,工程师,主要从事超精密测量技术与仪器工程等方面研究。Email: zhouyong99@caep.cn

引用本文:

周勇,李建军,赵天明,王震宏,唐胜江. 基于光谱共焦的在线集成表面粗糙度测量方法[J]. 计量学报, 2021, 42(6): 753-758.
ZHOU Yong, LI Jian-jun, ZHAO Tian-ming, WANG Zhen-hong, TANG Sheng-jiang. A Method of On-line Integration Roughness Measurement Based on Chromatic Spectrum Confocal. Acta Metrologica Sinica, 2021, 42(6): 753-758.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2021.06.10 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2021/V42/I6/753

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