Abstract:Three-dimensional finite element model of array sensor of electrical capacitance tomography is established based on COMSOL software and the solution of forward problem of ECT is completed.Dimensionless parameter optimization of array electrode with three-layer distribution of ECT is carried out.Firstly, the influence of the screen radius R3, electrode height h, electrode width w and layer spacing l on the sensitivity uniformity index P and the dynamic range D of the capacitance value is analyzed.After that, using orthogonal experiment design, the effect of each structural parameters is integrated and balanced.At last, the optimal ECT three-dimensional sensor structural parameters are obtained as R3=1.50,h=0.20,w=0.20,l=0.06.
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