微小液体流量装置技术发展研究

doi:10.3969/j.issn.1000-1158.2020.Z1.01

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摘要为建立我国微小液体流量标准,比较研究了不同技术机构的微小液体流量装置,这些装置的流量范围为50nL/min~1000mL/min,相对不确定度为0.04%~4.5%。分类总结了这些装置的流量范围、不确定度水平、压力、温度等参数,并对装置的供水系统、除气系统和液体收集系统进行了分析,其中供水系统主要由毛细管、注射泵和质量流量控制器3种方式组成,除气系统主要由超声除气和在线脱气2种方式组成,液体收集系统主要分为出口管和烧杯形成液桥加湿度陷阱、出口管浸入液面加油膜覆盖和出口管浸入液面加湿度陷阱3种方式。最后汇总了对计时器漂移及通讯延迟、天平的漂移及校准、蒸发、浮力和表面张力、流量稳定性及重复性等不确定度来源。

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	刘莉
	周昶
	高峰
	孟涛

关键词 ：计量学, 微小液体流量, 液体流量装置, 蒸发, 注射泵

Abstract：In order to establish Chinese micro liquid flow standards, the micro liquid flow facility of different countries and regions have been investigated. The flow range is 50nL/min~1000mL/min, and the uncertainty is 0.04%~4.5%. The parameters such as flow range, uncertainty level, pressure, temperature are collected, and the water supply system, degassing system and liquid collection system of the facility are classified and summarized. The water supply system is mainly composed of capillary tube, injection pump and mass flow controller. The degassing system is mainly composed of ultrasonic degassing or online degassing. The liquid collection system is mainly divided into three methods:the outlet pipe and the beaker form a liquid bridge and humidity trap, the outlet pipe is immersed in the liquid surface and the oil film is covered, and the outlet pipe is immersed in the liquid surface and the humidity trap. Finally, the main sources of uncertainty such as timer drift and communication delay, balance drift and calibration, evaporation, buoyancy and surface tension, flow stability and repeatability are summarized.

Key words： metrology liquid micro flow liquid flow facility evaporation injection pump

PACS:

TB937

基金资助:质量技术监督能力提升专项（ANL1808）;工业互联网标识解析二级节点项目（能源行业应用服务平台TC190A3X8-3)

通讯作者: 孟涛（1977-),男,北京人,工学博士,中国计量科学研究院研究员,主要从事液体流量计量装置及测试方法研究。Email: mengt@nim.ac.cn

作者简介: 刘莉（1991-),女,山东泰安人,广州能源检测研究院助理工程师,从事微小液体流量计量、流量标准装置研究。Email: llgdut@foxmail.com

引用本文:

刘莉,周昶,高峰,孟涛. 微小液体流量装置技术发展研究[J]. 计量学报, 2020, 41(12A): 1-6.
LIU Li,ZHOU Chang,GAO Feng,MENG Tao. Research on Technology Development of Micro Liquid Flow Facility. Acta Metrologica Sinica, 2020, 41(12A): 1-6.

链接本文:

http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2020.Z1.01 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2020/V41/I12A/1

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