液晶玻璃面板光学检测仪器气浮平台系统参数优化设计

doi:10.3969/j.issn.1000-1158.2019.06.09

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摘要液晶玻璃平板在线检测流程当中,气膜的流场压力和速度的分布需要较高的稳定性,为了比较不同的气浮平台供气方式对气膜稳定性的影响,结合气体润滑理论,分析得出气膜稳定后的压力分布情况。通孔在气浮板上通常采用阵列排布,使用Gambit对气浮平台三维模型进行网格的划分,再将其导入软件Fluent中,对正压供气方式和正负压供气方式进行仿真计算,分析得到2种不同供气模式下气浮力的分布以及速度分布。由以上分析可得,若气浮系统中其余变量保持不变,正负压同时供气方式优势更加明显,气膜稳定后气浮力和速度分布平缓,所需气体的质量流量较正压供气方式更少。以正负压同时供气方式自制玻璃基板光学缺陷检测样机,实验结果表明气膜间隙变化量小于1μm。

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	周杨
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	黄斌

关键词 ：计量学, 液晶玻璃面板, 气浮支承, 供气方式, Fluent仿真

Abstract：During the on-line detection of liquid crystal glass plates, the distribution of the pressure and the velocity in the gas film flow field are required to be gentle and the stability. In order to compare the effects of different air-floating platforms on the stability of the gas film, combined with the gas lubrication theory, the pressure distribution of the stable gas film was obtained. The through holes were generally arranged in an array on the air floating plate. Gambit was used to mesh the three-dimensional model of the air-floating platform, and then introduced into the Fluent software to simulate the positive pressure air supply mode and the positive and negative pressure air supply mode. The distribution of the air buoyancy and velocity were obtained under two different air supply modes. From the above analysis, if the remaining variables in the air-floating system remain unchanged, the advantages of positive and negative pressure at the same time of gas supply are more obvious, and the air buoyancy and velocity distribution are smooth after the gas film is stabilized, and the mass flow rate of the required gas is less than that of the positive pressure. Based on the above research, a glass substrate optical defect detection prototype was fabricated by positive and negative pressure simultaneous gas supply. The experimental results show that the change of film gap is less than 1μm and the stability is good.

Key words： metrology liquid crystal glass panel air bearing support gas supply mode Fluent simulation;

收稿日期: 2018-11-09 发布日期: 2019-10-10

PACS:

TB96

基金资助:国家重大科学仪器设备开发专项(2013YQ220749)

通讯作者: 黄斌(1963-), 男, 安徽合肥人, 合肥工业大学教授, 博士,主要从事大型光学精密仪器结构设计及气浮系统设计及总体误差理论分析。Email: ahhb7310168@163.com E-mail: ahhb7310168@163.com

作者简介: 周杨(1994-), 男, 安徽宿州人, 合肥工业大学在读硕士研究生, 主要研究方向为仪器及装备精度保障技术、精密仪器与机械。Email: 577166370@qq.com

引用本文:

周杨,李程伟,徐筱波,张勇,黄斌. 液晶玻璃面板光学检测仪器气浮平台系统参数优化设计[J]. 计量学报, 2019, 40(6): 994-999.
ZHOU Yang,LI Cheng-wei,XU Xiao-bo,ZHANG Yong,HUANG Bin. Parameter Optimization Design of Air-floating Platform System for Optical Testing Instrument of Liquid Crystal Glass Panel. Acta Metrologica Sinica, 2019, 40(6): 994-999.

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