Abstract：To study the technique of on-wafer self-calibration, a GaAs-based Multi-TRL calibration standard kit on coplanar waveguideis is developed. It can be used for measurement system of on-wafer scattering parameters from 1 GHz to 110 GHz. The design of the calibration kitis is demonstrated and shows that good agreement with foreign commercial calibration kit and metrological calibration reference material.
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2019, Vol. 40 
