时栅转台自动标定系统的研究

doi:10.3969/j.issn.1000-1158.2016.01.02

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摘要提出一种自动检测时栅转台误差、辨识误差模型系数和误差补偿的方法。该系统利用自制的数控控制箱结合嵌入式技术,以高精度的圆光栅作为基准量仪, 以双微控制器与上位机为基础,形成双闭环控制结构,实现系统的高精度定位。在对极点8个待定参数和对极内20个待定参数分别进行傅里叶变换的参数辨识,得到辨识误差模型的系数,实现了实时在线误差补偿。实验结果表明,时栅转台的精度达到2.4″,提高了时栅转台标定精度与标定效率。

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	张天恒
	王培懿
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	索龙博

关键词 ：计量学, 时栅转台, 自动标定, 参数辨识, 双闭环

Abstract：An automatic measurement method is proposed to measur error time grating turntable, identify parameters of model and compensating error. The system adopts home-made numerical control box combining with embedded technology. The high precision grating is used as reference meter, and the double closed-loop control structure is formed with double micro-controller and PC to achieve high-precision positioning system. The undetermined parameters, 8 on poles and 20 within poles, are identified by the Fourier transform, to obtain coefficients of identifying error model and to realize the real-time online error compensation. Experimental results show that the double closed-loop control system and parameter identification of Fourier transform, can improve the accuracy and the efficiency of calibration, and the accuracy of the time grating turntable is up to 2.4 ″.

Key words： metrology time grating turntable automatic calibration parameter identification double closed loop

收稿日期: 2014-11-13 发布日期: 2015-12-10

PACS:

TB922

基金资助:国家自然科学基金（51405049,51435002,51475063,51406020）

通讯作者: 张天恒 E-mail: zth@cqut.edu.cn

作者简介: 张天恒（1973-）,男,甘肃武威人,重庆理工大学工程师,硕士,研究方向为计算机辅助测试和智能传感技术。zth@cqut.edu.cn

引用本文:

张天恒,王培懿,武亮,索龙博. 时栅转台自动标定系统的研究[J]. 计量学报, 2016, 37(1): 6-9.
ZHANG Tian-heng,WANG Pei-yi,WU Liang,SUO Long-bo. Research of the Time Grating Turntable Automatic Calibration System. Acta Metrologica Sinica, 2016, 37(1): 6-9.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2016.01.02 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2016/V37/I1/6