精度补偿能够在不增加制造成本的前提下提升六自由度并联机器人运动精度。然而，传统的精度补偿方法依赖多维坐标/位姿测量系统，测量精度有限，难以实现高精度补偿。为了提高并联机器人的精度，提出了一种基于一维干涉测量的高精度补偿方法，通过提高测量精度提升精度补偿能力。建立了六自由度并联机器人的相对误差模型，利用一维激光干涉仪测量终端平台的相对距离，构建误差损失函数，通过结合优化算法实现降维误差补偿。实验结果表明：所提方法可将六自由度并联机器人的位置均方根误差从19.74 μm降低至3.82 μm，精度提升了约80.65%。

Accuracy compensation can improve the motion accuracy of six-degree-of-freedom parallel robots without increasing manufacturing costs. However， traditional accuracy compensation methods rely on multi-dimensional coordinate/pose measurement systems， which have limited measurement accuracy and make it difficult to achieve high-precision compensation. To enhance the accuracy of parallel robots， this paper proposes a high-precision compensation method based on one-dimensional interferometric measurement， which improves the compensation capability by increasing the measurement accuracy. A relative error model of the 6-DOF parallel robot is established， and a one-dimensional laser interferometer is used to measure the relative distance of the end-effector platform. By constructing an error loss function and combining it with an optimization algorithm， dimensionality reduction error compensation is realized. Experimental results show that the proposed method can reduce the root mean square position error of the 6-DOF parallel robot from 19.74 μm to 3.82 μm， improving the accuracy by approximately 80.65%.