真空退火炉被用于真空或保护气氛下材料的热处理，需要进行在线校准，目前缺少校准装置和校准方法指导，针对此，设计了一种真空退火炉温度在线校准装置。通过采用多支多点铠装热电偶、立体测温架、多通道数据采集仪、在线校准装置等相结合的方式，实现了真空退火炉温度均匀性、稳定度、偏差、有效加热区等计量特性的在线校准。采用该方法与测温环法、黑匣子测温法对同一台真空退火炉温度均匀性进行测试，结果表明：测温环法和黑匣子测温法测量结果偏差较大；该方法测量结果为 ∆ {\theta }_{+} = ( \mathrm{4.2} \pm \mathrm{1.5} ) ℃ , k = \mathrm{2}； ∆ {\theta }_{-} = ( - \mathrm{5.6} \pm \mathrm{1.6} ) ℃ , k = \mathrm{2}；有效加热区尺寸为：长900 mm，宽800 mm，高800 mm。测量结果满足使用要求，通过3家实验室比对，对本校准方法的准确性、可靠性进行验证，结果均为满意。

Vacuum annealing furnaces are used for heat treatment of materials under vacuum or protective atmosphere， and online calibration is required. Currently， there is a lack of calibration equipments and calibration method guidance. In response to this， a temperature online calibration device for vacuum annealing furnace was designed to solve the sealing problem of the connection between the vacuum annealing furnace and the temperature sensor. By combining multiple multi-point armored thermocouples， three-dimensional temperature measuring frames， multi-channel data acquisition instruments， and online calibration devices， the online calibration of the temperature uniformity， stability， deviation， effective heating zone and other metrological characteristics of the vacuum annealing furnace were achieved. The temperature uniformity of the same vacuum annealing furnace was tested using this method， along with the temperature measurement ring method and black box temperature measurement method. The results showed that there was a significant deviation in the measurement results between the temperature measurement ring method and the black box temperature measurement method. The measurement results of this method are ∆ {\theta }_{+} = ( \mathrm{4.2} \pm \mathrm{1.5} ) ℃ , k = \mathrm{2}； ∆ {\theta }_{-} = ( - \mathrm{5.6} \pm \mathrm{1.6} ) ℃ , k = \mathrm{2}； the effective heating zone size is 900 mm in length， 800 mm in width， and 800 mm in height. The measurement results meet the requirements for use. The accuracy and reliability of this calibration method have been verified through comparison with three laboratories， and the results are satisfactory.