介绍一种针对内部带有驱动部件的压电加速度计的校准方法,基于互易法的校准原理,通过2次试验测量2个端口灵敏度的比值和乘积,实现互易压电加速度计的校准。通过建立互易压电加速度计的振动方程及力学模型,分析了灵敏度比值、灵敏度乘积和自校准系数的频率响应特性,并说明了对应的校准方法。与激光干涉法进行了对比验证实验,实验结果表明:在频率范围5~4000Hz,2个端口灵敏度的平均相对偏差分别不超过1%和2%,最大相对偏差分别不超过2%和4%。
Abstract
A calibration method for piezoelectric accelerometers with internal driving components was introduced. Based on the calibration principle of the reciprocal method, the reciprocal piezoelectric accelerometer can be calibrated by measuring the ratio and product of the two port sensitivities through two experiments. By establishing the vibration equation and mechanical model of the reciprocal piezoelectric accelerometer, the frequency response characteristics of the sensitivity ratio, sensitivity product and self-calibration coefficient are analyzed, and the corresponding measurement methods are explained. The comparison validation experiment between this method and the laser interferometry was carried out, the experimental results show that in the frequency range of 5~4000Hz, the average relative deviation of the sensitivity of the two ports does not exceed 1% and 2%, respectively, and the maximum relative deviation does not exceed 2% and 4%, respectively.
关键词
计量学 /
振动校准 /
压电加速度计 /
互易法 /
电激励
Key words
metrology /
vibration calibration /
piezoelectric accelerometer /
reciprocity method /
electrical excitation
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基金
国家重点研发计划(2017YFF0205003)
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