小型化硅基微腔光子测温系统

梅明城; 韩琪娜; 施杨; 周琨荔; 曾九孙; 王瑾; 张诚; 高建新; 瞿志二; 潘奕捷; 屈继峰

doi:10.3969/j.issn.1000-1158.2023.07.07

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计量学报 ›› 2023, Vol. 44 ›› Issue (7) : 1052-1058. DOI: 10.3969/j.issn.1000-1158.2023.07.07

热学计量

小型化硅基微腔光子测温系统

梅明城^1,3,韩琪娜^2,3,施杨³,周琨荔³,曾九孙¹,王瑾³,张诚^3,4,高建新^3,5,瞿志二^3,4,潘奕捷³,屈继峰³

作者信息 +

A Miniaturized Silicon Microcavity Based Photonic Temperature Measurement System

MEI Ming-cheng^1,3,HAN Qi-na^2,3,SHI Yang³,ZHOU Kun-li³,ZENG Jiu-sun¹,WANG Jin³,ZHANG Cheng^3,4,GAO Jian-xin^3,5,QU Zhi-er^3,4,PAN Yi-jie³,QU Ji-feng³

Author information +

文章历史 +

摘要

回音壁模式硅基微腔光子温度传感可应用于强电磁场、高辐照、强振动等极端环境下的温度测量。在前期设计、制备、验证具有毫开尔文(mK)量级分辨率的硅基微环光子温度传感器的基础上,研制了一套小型化微腔光子测温硬件系统,包括信号发生与高速数模转换、电压-电流转换、激光二极管温度控制和微弱信号采集与放大等模块,设计并实现了基于单片机的同步测量方案和光谱测温算法。在高稳定恒温浴槽内验证了系统性能,实际测温结果的扩展不确定度为115mK(k=2),测温范围30K。

Abstract

The photonic temperature sensing based on silicon microcavity with whispering gallery mode can be applied in extreme environments such as strong electromagnetic field, high irradiation and strong vibration. On the basis of silicon microcavity photonic temperature sensor with mK resolution which is pre-designed, fabricated and validated, a miniaturized microcavity photonic temperature measurement hardware system was developed, which includes modules of signal generation, high-speed digital-to-analog conversion, voltage-to-current conversion, laser diode temperature control, weak signal acquisition and amplification were designed and implemented, as well as the algorithm of synchronous measurement and spectral temperature measurement based on single chip microcomputer. The system performance was verified in a high stable constant temperature bath, the extended uncertainty of the actual temperature measurement results is 115mK (k=2), and the temperature range is 30K.

导出引用

梅明城,韩琪娜,施杨,周琨荔,曾九孙,王瑾,张诚,高建新,瞿志二,潘奕捷,屈继峰. 小型化硅基微腔光子测温系统[J]. 计量学报. 2023, 44(7): 1052-1058 https://doi.org/10.3969/j.issn.1000-1158.2023.07.07

MEI Ming-cheng,HAN Qi-na,SHI Yang,ZHOU Kun-li,ZENG Jiu-sun,WANG Jin,ZHANG Cheng,GAO Jian-xin,QU Zhi-er,PAN Yi-jie,QU Ji-feng. A Miniaturized Silicon Microcavity Based Photonic Temperature Measurement System[J]. Acta Metrologica Sinica. 2023, 44(7): 1052-1058 https://doi.org/10.3969/j.issn.1000-1158.2023.07.07

中图分类号： TB942

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