基于钨钢探针和PVDF压电薄膜材料,设计研制了一种用于聚焦超声测量的新型传感器。同时,通过理论分析和有限元分析软件建立了传感器物理模型,并对传感器的内部声场及反射状况进行了模拟仿真,获得传感器输出信号的波形和幅值。最后,利用研制的传感器对聚焦换能器焦域声压和声强进行检测,并将检测结果与理论仿真结果对比,在10W的声功率范围内,证明了新型传感器及其测量理论和方法在聚焦超声测量中的可行性与可靠性。该新型反射探针传感器将为高强度聚焦超声声场的测量提供一种新的方法。
Abstract
Based on the tungsten steel probe and PVDF piezoelectric film material, a new sensor was designed and developed for focused ultrasound measurement. At the same time, the physical model of the sensor was established through theoretical analysis and finite element analysis, and the internal acoustic field and reflection phenomenon of the sensor were simulated to obtain the waveform of the output from the sensor and its amplitude. Finally, the sensor developed was used to detect the acoustic pressure and acoustic intensity in the focal area of the focusing transducer, and the results were compared with the results based on theoretical simulation. Within the acoustical power range of 10W, the feasibility and reliability of the new sensor as well as its measurement theory and method were proved for focused ultrasound measurement. The new reflection probe sensor will provide a new method for the measurement of high intensity focused ultrasonic field.
关键词
计量学 /
聚焦超声 /
反射探针 /
传感器 /
有限元 /
焦域
Key words
metrology /
focused ultrasonic /
reflection probe /
sensor /
finite element /
focal area
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基金
国家重点研发计划(2018YFC0114902-1,2016YFF0201006);浙江省自然科学基金 (LQ20A040007)
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