用于微位移测量的迈克尔逊激光干涉仪综述

王冬; 崔建军; 张福民; 闵帅博; 陈恺

doi:10.3969/j.issn.1000-1158.2021.01.01

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计量学报 ›› 2021, Vol. 42 ›› Issue (1) : 1-8. DOI: 10.3969/j.issn.1000-1158.2021.01.01

几何量计量

用于微位移测量的迈克尔逊激光干涉仪综述

王冬¹,崔建军²,张福民¹,闵帅博³,陈恺²

作者信息 +

Review of Michelson Laser Interferometer for Micro Displacement Measurement

WANG Dong¹,CUI Jian-jun²,ZHANG Fu-min¹,MIN Shuai-bo³,CHEN Kai²

Author information +

文章历史 +

摘要

迈克尔逊干涉术测量微位移可实现纳米甚至更高的分辨力,并且具备能直接溯源至激光波长等诸多优点,是目前微位移测量的重要技术手段。以限制迈克尔逊干涉仪品质提高的非线性误差为主要切入点,对目前各种基于迈克尔逊干涉原理的激光干涉技术进行了分类介绍,主要讨论了微位移测量中实现高精度和高分辨率的干涉测量技术,最后展望了激光干涉法测量微位移的近期发展趋势。

Abstract

Michelson interferometry can achieve nanometer or even higher resolution, and can be directly traced to laser wavelength and many other advantages. It is an important technical measure of micro displacement measurement at present. Aiming at various laser interferometric techniques based on Michelson interferometer principle are classified and introduced. The interferometric measurement techniques to achieve sub-nanometer accuracy and resolution in micro-displacement measurement are mainly discussed. Finally, the development trend of laser micro displacement measurement is prosected in future.

导出引用

王冬,崔建军,张福民,闵帅博,陈恺. 用于微位移测量的迈克尔逊激光干涉仪综述[J]. 计量学报. 2021, 42(1): 1-8 https://doi.org/10.3969/j.issn.1000-1158.2021.01.01

WANG Dong,CUI Jian-jun,ZHANG Fu-min,MIN Shuai-bo,CHEN Kai. Review of Michelson Laser Interferometer for Micro Displacement Measurement[J]. Acta Metrologica Sinica. 2021, 42(1): 1-8 https://doi.org/10.3969/j.issn.1000-1158.2021.01.01

中图分类号： TB921

参考文献

［1］赵凯华, 钟锡华. 光学(上册)［M］. 北京: 北京大学出版社, 1984: 309.
［2］胡红波, 杨丽峰, 于梅. 零差干涉仪用于振动校准中关键技术的研究［J］. 计量学报, 2018, 39(3): 368-372.
Hu H B, Yang L F, Yu M. Study on key technologies of vibration calibration using homodyne interferometer［J］. Acta Metrologica Sinica, 2018, 39(3): 368-372.
［3］崔建军. 基于Fabry-Perot干涉与原子晶格间距的微位移计量及溯源研究［D］. 天津: 天津大学, 2014.
［4］祝宏彬, 陈俊雹, 郭冬梅, 等. 零差激光干涉仪的大范围位移测量与精度分析［J］. 光电子技术, 2016, 36(1): 5-11.
Zhu H B, Chen J B, Guo D M, et al. Large-range Displacement Measurement and Accuracy Analysis of Homodyne Laser Interferometer［J］. Optoelectronic Technology, 2016, 36(1): 5-11.
［5］殷纯永. 现代干涉测量技术［M］. 天津: 天津大学出版社, 1999.
［6］羡一民. 激光干涉仪的基本类型-激光干涉仪技术系列综述之一［J］. 工具技术, 2014, 48(7): 84-87.
Xian Y M. Basic Types of Laser Interferometer-Review I of Laser Interferometer Technology［J］. Tool Engineering, 2014, 48(7): 84-87.
［7］杨明, 蔡晨光, 刘志华, 等. 基于外差激光干涉法的三轴向振动绝对校准方法研究［J］. 计量学报, 2018, 39(2): 201-206.
Yang M, Cai C G, Liu Z H, et al. Research on the method of the triaxial primary vibration calibration using the heterodyne interferometry［J］. Acta Metrologica Sinica, 2018, 39(2): 201-206.
［8］Yim N B, Eom C I, Kim S W. Dual mode phase mea-surement for optical heterodyne interferometry［J］. Measurement Science and Technology, 2000, 11(8): 1131.
［9］卢明臻, 高思田, 施玉书, 等. 单频激光干涉仪非线性误差修正方法［J］. 计量学报, 2010, 31(4): 289-293.
Lu M Z, Gao S T, Shi Y S, et al. Research in the nonlinearity correction of the homodyne interferometer［J］. Acta Metrologica Sinica, 2010, 31(4): 289-293.
［10］金涛,唐一揆,乐燕芬, 等. 一种单频激光干涉仪非线性误差修正方法研究［J］. 计量学报, 2020, 41(6): 676-681.
Jin T, Tang Y K, Le Y F, et al. A Research on Correction Method of Nonlinear Errors for Homodyne Laser Interferometer［J］. Acta Metrologica Sinica, 2020, 41(6): 676-681.
［10］黄雷, 马宏, 马钟焕, 等. 单频激光干涉仪非线性误差优化方法研究［J］. 计量学报, 2013, 34(2): 122-127.
Huang L, Ma H, Ma Z H, et al. Research of Nonlinearity Error Optimization for Single Frequency Laser Interfer-ometer［J］. Acta Metrologica Sinica, 2013, 34(2): 122-127.
［11］乐燕芬, 句爱松. 外差激光干涉仪非线性误差分析及测量［J］. 激光与光电子学进展, 2016, 53(5): 051203.
Le Y F, Ju A S. Analysis and measurement of the nonlinear errors in heterodyne interferometers ［J］. Laser &Optoelectronics Progress, 2016, 53(5): 051203.
［12］Hou W M, Wilkening G. Investigation and compensation of the nonlinearity of heterodyne interferometers［M］. Heidelberg: Springer Berlin Heidelberg, 1992, 91-98.
［13］Badami V G, Patterson S R. A frequency domain method for the measurement of nonlinearity in heterodyne interferometry［J］. Precision Engineering, 2000, 24(1): 41-49.
［14］Eom T B, Choi T Y, Lee K H, et al. A simple method for the compensation of the nonlinearity in the heterodyne interferometer［J］. Measurement Science and Technology, 2002, 13 (2): 222-225.
［15］许婕, 徐毅, 叶孝佑. 激光干涉仪非线性的测量［J］. 计量学报, 2003, 24(4): 271-274.
Xu J, Xu Y, Ye X Y. The measurement for the non-linearity of laser interferometer［J］. Acta Metrologica Sinica, 2003, 24(4): 271-274.
［16］张瑀珊. 基于锁相放大的外差激光干涉仪非线性测试技术研究［D］. 哈尔滨: 哈尔滨工业大学, 2017.
［17］Lawall J, Kessler E. Michelson interferometry with 10pm accuracy［J］. Review of Scientific Instruments, 2000, 71(7): 2669-2676.
［18］Wu C M. Heterodyne interferometric system with sub-nanometer accuracy for measurement of straightness［J］. Applied Optics, 2004, 43(19): 3812-3816.
［19］Ellis J D, Meskers A J H, Spronck J W, et al. Fiber-coupled displacement interferometry without periodic nonlinearity［J］. Optics letters, 2011, 36(18): 3584-3586.
［20］Weichert C, Koechert P, Koening R, et al. A heterodyne interferometer with periodic nonlinearities smaller than ±10pm［J］. Measurement Science and Technology, 2012, 23(9): 094005.
［21］贺寅竹, 赵世杰, 尉昊赟, 等. 跨尺度亚纳米分辨的可溯源外差干涉仪［J］. 物理学报, 2017, 66(6):43-49.
He Y Z, Zhao S J, Wei H Y, et al. Traceable traps-scale heterodyne interferometer with subnanometer resolution ［J］. Acta Phys. Sin., 2017, 66(6): 43-49.
［22］Zhao S J, Wei H Y, ZHU M H, et al. Green laser interferometric metrology system with sub-nanometer periodic nonlinearity［J］. Applied Optics, 2016, 55(11): 3006-3011.
［23］Ahn J, Kim J A, Kang C S, et al. A passive method to compensate nonlinearity in a homodyne interferometer［J］. Optics express, 2009, 17(25): 23299-23308.
［24］Poar T, Moina J. Enhanced ellipse fitting in a two-detector homodyne quadrature laser interferometer［J］. Measurement Science and Technology, 2011, 22(8): 085301.
［25］侯文玫, 张运波, 乐燕芬, 等. 外差激光干涉测长非线性误差的消除［J］. 中国激光, 2012, 39(9): 162-167.
Hou W M, Zhang Y B, Le Y F, et al. Elimination of the Nonlinearity of Heterodyne Displacement Inter-ferometers［J］. Chinese Journal of Lasers, 2012, 39(9): 162-167.
［26］Cui J, He Z, Jiu Y, et al. Homodyne laser interferometer involving minimal quadrature phase error to obtain sub-nanometer nonlinearity［J］. Applied Optics, 2016, 55(25): 7086-7092.
［27］严利平. 激光合成波长纳米位移测量干涉仪的研制［D］. 杭州: 浙江理工大学, 2014.
［28］Chen B Y, Yan L P, Yao X G, et al. Development of a laser synthetic wavelength interferometer for large displacement measurement with nanometer accuracy［J］. Optics Express, 2010, 18(3): 3000-3010.
［29］侯文玫, 王俊. 外差激光干涉仪非线性的细分和消除［J］. 计量学报, 2007, 28(3): 210-215.
Hou W M, Wang J. Subdivision and Elimination of Nonlinearity in Heterodyne Interferometers［J］. Acta Metrologica Sinica, 2007, 28(3): 210-215.
［30］Pisani M. A homodyne Michelson interferometer with sub-picometer resolution［J］. Measurement Science and Technology, 2009, 20(8): 084008.
［31］Lee J, Yoon H, Yoon T H. High-resolution parallel multipass laser interferometer with an interference fringe spacing of 15nm［J］. Optics Communications, 2011, 284(5): 1118-1122.