ICF靶丸表面形貌及球度误差检测

费致根; 王开创; 周强; 巩晓赟; 费致根; 王开创; 周强; 巩晓赟

doi:10.3969/j.issn.1000-1158.2020.04.003

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计量学报 ›› 2020, Vol. 41 ›› Issue (4) : 406-412. DOI: 10.3969/j.issn.1000-1158.2020.04.003

几何量计量

ICF靶丸表面形貌及球度误差检测

费致根¹, 王开创¹, 周强², 巩晓赟¹

作者信息 +

Inspection on Surface Morphology and Sphericity Error of ICF Capsule

FEI Zhi-gen¹, WANG Kai-chuang¹, ZHOU Qiang², GONG Xiao-yun¹

Author information +

文章历史 +

摘要

为了对ICF靶丸的表面形貌及球度误差进行高精度测量,开发了一台五轴坐标测量机,并采用锥光全息技术的激光测头实现对靶丸表面的高精度、非接触检测。首先,根据靶丸表面的结构特点,改进了基于最小二乘的球度误差评价算法;然后,介绍了作为实验平台的五轴坐标测量机的整体配置,推导了该坐标测量机的测量数学模型,该坐标测量机可实现在多个姿态下对靶丸的非接触取点测量;最后,在相同条件下,进行了5次实验测量,其结果表明:靶丸球度误差测量的均值为0.0021mm,标准差为2.07x10^-4mm。该检测方法可以满足对靶丸表面形貌及球度误差高精度、高稳定性的测量要求。

Abstract

In order to accurately measure the surface morphology and sphericity error of ICF capsule, a five-axis coordinate measuring machine is designed and the laser probe based onconoscopicholography is used. Firstly, according to the structural characteristics of the capsule surface, the sphericity error evaluation algorithm based on least squares is improved.Then, the overall configuration of a five-axis coordinate measuring machine(CMM)is introduced as an experimental platform, the measurement mathematical model of the CMM is deduced. The points on the capsule surface can be collected under a variety of gestures in the non-contact way. Finally, five measurement were made under the same working condition, the results of the experiments show that the average value of sphericity error of capsule is 0.0021mm and its standard deviation is 2.07×10^-4mm. The proposed method can meet the measurement requirement of high accuracy and high stability upon the sphericity error of capsule.

导出引用

费致根, 王开创, 周强, 巩晓赟. ICF靶丸表面形貌及球度误差检测[J]. 计量学报. 2020, 41(4): 406-412 https://doi.org/10.3969/j.issn.1000-1158.2020.04.003

FEI Zhi-gen, WANG Kai-chuang, ZHOU Qiang, GONG Xiao-yun. Inspection on Surface Morphology and Sphericity Error of ICF Capsule[J]. Acta Metrologica Sinica. 2020, 41(4): 406-412 https://doi.org/10.3969/j.issn.1000-1158.2020.04.003

中图分类号： TB92

参考文献

1 王淦昌. 21世纪主要能源展望［J］. 核科学与工程, 1998,18(2): 97-108. WangG C. The prospect of main energy source in 21 century［J］. Chinese Journal of Nuclear Science and Engineering, 1998, 18(2): 97-108.
2 向世清. 激光驱动核聚变研究进展［J］. 科学, 2014, 66(5): 22-25. XiangS Q. Progress in laser-driven nuclear fusion［J］. Science, 2014, 66(5): 22-25.
3 张林, 杜凯. 激光惯性约束聚变靶技术现状及其发展趋势［J］. 强激光与粒子束, 2013, 25(12): 3091-3097. ZhangL, DuK. Target technologies for laser inertial confinement fusion: State-of-the-art and future perspective［J］. High Power Laser and Particle Beams, 2013, 25(12): 3091-3097.
4 BlackwellB D. Design and characterization of the magnetized plasma interaction experiment (MAGPIE): A new source for plasma-material interaction studies［J］. Plasma Sources Science & Technology, 2012, 21: 1-7.
5 LucibellaM. More basic research at the National Ignition Facility［J］. APS NewsⅡ, 2014, 23(6): 1.
6 NuckollsJ, WoodL, ThiessenA, et al. Laser compression of matter to super-high densities: Thermo nuclear(CTR)application ［J］. Nature, 2015, 239(239): 139-142.
7 MosesE I. The National Ignition Facility: The worlds largest optics and laser system［C］. Proc of SPIE, San Jose, CA, USA, 2003.
8 RiethM, DudarevS L, GonzalezS M, et al. Recent progress in research on tungsten material for nuclear fusion applications in Europe［J］. Journal of Nuclear Materials, 2013, 432(1): 482-500.
9 ChengB L. Scaling laws for ignition at the National Ignition Facility from first principles［J］. Physical Review E, 2013, 88(4): 041101.
10 蒲昱东, 陈伯伦, 黄天晅, 等. 激光间接驱动惯性约束聚变内爆物理实验研究［J］. 强激光与粒子束, 2015, 27(3): 129-140. PuY D, ChenB L, HuangT X, et al. Experimental studies of implosion physics of indirect-drive inertial confinement fusion［J］. High Power Laser and Particle Beams, 2015, 27(3): 129-140.
11 TangJ, ZhiyongX, DuA, et al. Design and fabrication of a CH/RF/CH Tri-layer perturbation target for hydrodynamic instability experiments in ICF［J］. Journal of Fusion Energy, 2016, 35(2): 357-364.
12 HainesB M. Exponential yield sensitivity to long-wavelength asymmetries in three-dimensional simulations of inertial confinement fusion capsule implosion［J］. Physics of Plasmas, 2015, 22(8): 082710.
13 王明达, 高党忠, 刘元琼, 等. 扫描电子显微镜测量靶丸表面形貌［J］. 原子能科学技术, 1999, 33(4): 290-293. WangM D, GaoD Z, LiuY Q, et al. Surface morphology inspection of capsule with scanning electron microscope［J］. Atomic Energy Science and Technology, 1999, 33(4): 290-293.
14 SingletonR M, WeinsteinB W, HendricksC D. X-ray measurement of laser fusion targets using least squares fitting［J］. Applied Optics, 1979, 18(24): 4116-4123.
15 刘元琼, 罗青, 王明达. X射线法测量ICF靶丸参数中表面轮廓法的应用［J］. 强激光与粒子束, 2000, 12(1): 69-71. LiuY Q, LuoQ, WangM D. X-ray measurement of ICF target using surface profiler scanning［J］. High Power Laser and Particle Beams, 2000, 12(1): 69-71.
16 杨冬, 虞孝麒, 龚达涛. X射线法测量的ICF靶丸参数的图像分析［J］. 强激光与粒子束, 2004, 16(12): 1553-1557. YangD, YuX L, GongD T. Image analysis of ICF target by X-ray measurement［J］. High Power Laser and Particle Beams, 2004, 16(12): 1553-1557.
17 SommargrenG E. Phase shifting diffraction interferometry for measuring extreme ultraviolet optics［J］. OSA Trends in Optics and Photonics, 1996, 4: 108-112.
18 卢丙辉, 刘炳国, 孙和义, 等. 基于子孔径拼接的衍射干涉靶丸形貌检测技术［J］. 强激光与粒子束, 2016, 28(2): 1-5. LuB H, LiuB G, SunH Y, et al. Technology of target inspection by diffraction interferometer based on sub-aperture stitching［J］. High Power Laser and Particle Beams, 2016, 28(2): 1-5.
19 徐永祥, 陈磊, 朱日宏, 等. 微小球面曲率半径的测量研究［J］. 仪器仪表学报, 2006, 27(9): 1159-1162. XuY X, ChenL, ZhuR H, et al. Study on the measurement of radii of curvature of mini spheres. Chinese Journal of Scientific Instrument, 2006, 27(9): 1159-1162.
20 CookR, OverturfG E, BuckleyS R, et al. Production and characterization of doped mandrels for inertial-confinement fusion experiments［J］. J Vac Sci Technol A, 1994, 12(4): 1275-1280.
21 StephensR B, OlsonD, HuangH, et al. Complete surface mapping of ICF shells［J］. Fusion Science and Technology, 2004, 45(2): 210-213.
22 高党忠, 王明达, 刘元琼. 用原子力显微镜4π旋转技术测量靶丸表面粗糙度［J］. 强激光与粒子束, 1999, 11(3): 321-324. GaoD Z, WangM D, LiuY Q. Measurement of target surface roughness with 4πturning technology of AFM［J］. High Power Laser and Particle Beams, 1999, 11(3): 321-324.
23 赵学森, 孙涛, 高党忠, 等. 靶丸表面轮廓形貌AFM精密测量及特性评价［J］. 强激光与粒子束, 2005, 17(12): 1847-1851. ZhaoX S, SunT, GaoD Z, et al. Measurement and characteristic evaluation of target circumferential topography with AFM［J］. High Power Laser and Particle Beams, 2005, 17(12): 1847-1851.
24 SiratetG Y, PsaltisD. Conoscopic Holography［J］. Opt Lett , 1985, 10(1): 4-6.
25 林启敬, 吴昊, 张福政, 等. Cu/Ti纳米薄膜表面形貌的分形表征研究［J］. 计量学报, 2018, 39(5): 593-597. LinQ Z, WuH, ZhangF Z, et al. Research on Fractal Characterization of the SurfaceMorphology of Cu/Ti Nano Thin Film［J］. Acta Metrologiga Sinica, 2018, 39(5): 593-597.
26 吴乙万, 任志英, 高成辉, 等. 超精密光学镜片三维表面形貌参数评定方法研究［J］. 计量学报, 2017, 38(4): 410-415. WuY W, RenZ Y, GaoC H, et al. Study on 3D Surface Parameter Evaluation Method of Ultra Precision Optical Lenses［J］. Acta Metrologiga Sinica, 2017, 38(4): 410-415.