基于正交双轴激光干涉仪的二维光栅校准系统误差分析

doi:10.3969/j.issn.1000-1158.2019.6A.008

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摘要为了提高二维光栅系统的校准精度,建立了国家二维光栅校准标准装置并开展了试验研究。基于双轴正交激光干涉仪的二维光栅校准方法,建立了共平面运动结构的二维光栅校准试验装置,开发了基于C#的上位机自动控制测量程序实现自动校准;分析装置运动过程中几何误差对二维光栅校准结果的影响,提出角误差修正的黑箱模型,并使用MATLAB对安装平面作最小二乘拟合。

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	董欣媛
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	沈雪萍
	段发阶
	汪书辉

关键词 ：计量学, 二维光栅, 双轴激光干涉仪, 最小二乘平面拟合

Abstract：In order to improve the calibration accuracy of two-dimensional grating measurement system, a study was carried out to establish a national standard device of two-dimensional grating calibration. A two-dimensional grating calibration method based on dual-axis orthogonal laser interferometer was studied, and a two-dimensional grating calibration experimental device of coplanar motion structure was established. A automatic control calibration program based on C# was developed to realize automatic calibration. The influences of two-dimensional grating installation error on the calibration result were analyzed. A black box model of angular error correction was proposed, and the working plane based on MATLAB least squares fitting algorithm was utilized.

Key words： metrology two-dimensional grating dual-axis laser interferometer least squares plane fitting

收稿日期: 2019-10-31

PACS:

TB921

基金资助:国家重点研发计划项目（2017YFF0204803）

作者简介: 董欣媛（1995-), 女, 辽宁本溪人, 天津大学硕士研究生, 研究方向为几何量计量技术及激光二坐标测量技术。Email: 3013202038@tju.edu.cn

引用本文:

董欣媛, 孙双花, 崔京远, 沈雪萍, 段发阶, 汪书辉. 基于正交双轴激光干涉仪的二维光栅校准系统误差分析[J]. 计量学报, 2019, 40(6A): 36-41.
DONG Xin-yuan, SUN Shuang-hua, CUI Jing-yuan, SHEN Xue-ping, DUAN Fa-jie, WANG Shu-hui. Error Analysis of Two-dimensional Grating Calibration System Based on Orthogonal Dual-axis Laser Interferometer. Acta Metrologica Sinica, 2019, 40(6A): 36-41.

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http://jlxb.china-csm.org:81/Jwk_jlxb/CN/10.3969/j.issn.1000-1158.2019.6A.008 或 http://jlxb.china-csm.org:81/Jwk_jlxb/CN/Y2019/V40/I6A/36