Study on Different Curvature Radius Tips on the Nano Indentation Hardness at Super Low Depth
李晓兵1,陶兴付2,杨浩3,贺志勇1
1. Research Institute of Surface Engineering,Taiyuan University of Technology, Taiyuan, Shanxi 030024, China
2. Nationa Institute of Metrology, Beijing 100029, China
3. Anhui University of Technology, Maanshan, Anhui 243000, China
Abstract：Nano indentation experiments that were carried out with three different curvature radius tips on fused silica. The curvature radius and the area function of the tips is measured directly by the AFM method. In shallow indentation conditions, the measurement errors of indentation hardness would be affected by the variation of curvature radius of tip. The smaller the curvature radius of the tip , the faster obtained of the true indentation hardness as the increase of contact depth. As the same small indentation depth, the tested hardness is closer to its true value under a smaller curvature radius tip than that of larger one.
李晓兵,陶兴付,杨浩,贺志勇. 较浅压入下针尖曲率半径对纳米压入硬度影响的比较研究[J]. 计量学报, 2017, 38(6): 713-716.
LI Xiao-bing,TAO Xing-fu,YANG Hao,HE Zhi-yong. Study on Different Curvature Radius Tips on the Nano Indentation Hardness at Super Low Depth. Acta Metrologica Sinica, 2017, 38(6): 713-716.
［1］Oliver W C,Pharr G M. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments［J］.Journal of Materials Research, 1992, 7(6):1564-1583.
［2］朱瑛, 姚英学, 周亮. 纳米压痕技术及其试验研究［J］. 工具技术, 2004, 38(8):13- 16.
［3］李敏, 梁乃刚, 张泰华, 等. 纳米压痕过程的三维有限元数值实验研究［J］. 力学学报, 2003, 35(3):257-264.
［4］Chen W M, Li M, Zhang T H, et al. Influence of indenter tip roundness on hardness behavior in nano indentation［ J］. Materials Science and Engineering A, 2007, 445-446:323-327.
［5］黎正伟, 陶兴付, 树学峰, 等. 纳米压痕仪的压头面积函数校准方法的比较研究［J］. 计量学报, 2015, 36(4):403-407.
［6］王新伟, 陶兴付, 贺志勇, 等. 极浅压入下纳米压痕仪面积函数校准方法的研究［J］. 计量学报, 2017, 38(5):593-567.
［7］Jiao Y, Schaeffer T E. Accurate height and volume measurements on soft samples with the atomic force microscope［J］. Langmuir, 2004, 20(23):10038-10045.
［8］Barone A C, Salerno M, Patr N, et al. Calibration issues for nano indentation experiments: Direct atomic force microscopy measurements and indirect methods［J］.Microscopy Research and Technique, 2010, 73(10):996-1004.
［9］Herrmann K, Jennett N M, Wegener W, et al. Progress in determination of the area function of indenters used for nano indentation［J］.Thin Solid Films, 2000, 377-378:394-400.
［10］ISO 14577-1:2002 Metallic materials-Instrumented indentation test for hardness and materials parameters-Part 1: Test method［S］.2002.
［11］Cheng C M , Cheng Y T .On the initial unloading slope in indentation of elastic-plastic so lids by an indenter With an axisymmetric smooth profile［J］. Applied Physics Letters, 1997, 71(18):2623-2625.
［12］Sneddon I N. The relation between load and penetration in the axisymmetric boussinesq problem for a punch of arbitrary profile［J］. International Journal of Engineering Science, 1965, 3(1):47-57.
2017, Vol. 38 
