介绍了高准确度光辐射功率校准原理和方法,利用低温辐射计作为主标准器,以陷阱探测器作为传递标准,激光器作为光源,通过激光功率稳定装置,校准了硅陷阱探测器和铟镓砷陷阱探测器的绝对光谱响应度。选取476.1, 488, 514.7, 521, 568, 632.8, 647.1, 785, 852, 980, 1064, 1550,nm共12条谱线完成了校准实验,绝对光谱响应度测量不确定度均优于0.05%。通过量子效率模型得出了硅陷阱探测器的绝对光谱响应曲线。利用InGaAs陷阱探测器分立波长点的绝对光谱响应度与相对光谱响应曲线进行了验证分析。结果表明,2种陷阱探测器均可用作传递标准进行高准确度的可见光和近红外光辐射功率校准和量值传递。
Abstract
The principle and methods of optical radiation measurement was illustrated. The absolute spectral responsivity of Si trap detectors and InGaAs trap detectors were calibrated with the absolute cryogenic radiometer at eleven wavelengths between 400 nm and 1700 nm, which are 476.1, 488, 514.7, 521, 568, 632.8, 647.1, 785, 852, 980, 1064 and 1550 nm, respectively, with measurement uncertainties better than 0.05%. The absolute spectral responsivity curves of Si trap detectors were calculated by quantum efficiency model. The absolute responsivity of three wavelengths was applied to get absolute spectral responsivity from the relative spectral responsivity of InGaAs detector. Results show that the two types of trap detectors can be used to calibrate and transfer optical radiation value in the visible and near infrared spectral range.
关键词
计量学 /
绝对光谱响应度 /
绝对低温辐射计 /
陷阱探测器 /
不确定度
Key words
metrology /
absolute spectral responsivity /
absolute cryogenic radiometer /
trap detector /
uncertainty
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基金
国家“863”计划(2015AA123702); 国家技术基础项目(J312013A001)
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