建立了一种电化学腐蚀法钨探针制备系统,通过对电化学腐蚀过程中微弱电流信号的实时检测,实现对腐蚀电路快速通断的自动控制,断电时间0.3 ms。该系统制备出了具有与理想轮廓一致的指数形探针。分析了电解电压、电解液浓度与腐蚀电流的关系,得出腐蚀最佳参数。将石英音叉与钨探针粘接构成原子力显微镜测头,完成了调幅模式下的力曲线测试。实验结果表明:制作的钨探针满足原子力显微镜测头性能要求,音叉信号稳定,能识别10 nm的运动变化,为研制高性能音叉式原子力显微镜提供了实验技术基础。
Abstract
The system of tungsten probe tips preparation using electrochemical etching method is introduced. It can automatically and quickly control the corrosion on or off through the real-time detection of the electrochemical etching weak current signal and power-off time is 0.3 ms. The system has prepared the desired profile of the exponential probe. Analyzing the relationship between the electrolysis voltage, electrolyte concentration and the corrosion current, the optimum parameters for corrosion will be determined. The quartz tuning fork and homemade tungsten probe bonding constituted an atomic force microscope probe, this will make a force curve test in amplitude modulation mode. The results showed that the homemade tungsten probe can meet the requirements of AFM scanning head. Tuning fork signal is stable to identify changes in the movement of 10 nm. For the development of high performance tuning fork AFM provides the experimental technology base.
关键词
计量学 /
原子力显微镜 /
钨探针 /
石英音叉 /
电化学腐蚀
Key words
metrology /
AFM /
tungsten probe tip /
quartz tuning fork /
electrochemical etching
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