对传统相移轮廓测量技术进行研究,提出基于Gram-Schmidt 正交化法的两步相移任意步距相位轮廓测量技术并应用到三维轮廓测量中。由CCD采集两幅投影光栅图,且两幅图像之间的相移值不需要事先给定,可以随机取任意值;在保证精度的前提下,该技术只需两幅变形光栅图,同时无需对相移器的相移精度作要求。实验表明:与现有的几种相移轮廓术比较,提出的两步相移任意步距相位轮廓测量技术可以快速地恢复待测相位,且获取待测物体的三维数据精度较高,具有较强的适用性。
Abstract
The traditional PSP was researched. Based on a Gram-Schmidt(GS) orthonormalization approach, an two PSP with an arbitrary steps algorithm is proposed. The phase-shift value has not to be known and can taken any value inside the range. Compared with the existing methods, the method can only have two distorted grating image, and thire phase shift accuracy is not required. Experimental results show that compared with the existing methods, the structure is less demanding for the accuracy of the system, and the proposed method is faster, higher accuracy and more effectively.
关键词
计量学 /
相移测量轮廓术 /
任意步距相位轮廓术
Key words
metrology /
PSP /
profilometry with an arbitrary steps algorithm
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参考文献
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基金
国家自然科学基金(50975255);浙江省教育厅科研项目(Y201432278);衢州市科技计划项目(2015Y017)
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