Research of Nonlinearity Error Optimization for Single Frequency Laser Interferometer
1.School of Opto Electronic Engineering, Changchun University of Science and Technology, Changchun, Jilin 130022, China;
2. Jilin Institute of Metrology, Changchun, Jilin 130022, China;
3. Jilin Dong-guang Preciaion Mechanism Factorytd, Changchun, Jilin 130000, China
Abstract：To decrease the influence of the nonlinearity error on accuracy and stability of single-frequency laser interferometer, the factors are researched. Based on the Jones matrix, the optical parameters of the system are expressed. The optimal control adjustment to improve single-frequency laser interferometer is described. Experimental results show that the ordinary adjustment is limited to improve the system accuracy. But the orthogonality of signals, interference fringe contrast and system sensitivity are improved by optimal control adjustment. The interference fringe contrast vimax,o achieve to 0.97, and the four periods of two signals turn into two periods which 1/8 wave plate is revolved.
［6］Wu C M, Su C S, Peng G S, et al. Polarimetric nonlinearity-free, homodyne interferometer for vibration measurement ［J］. Metrologia, 1996, 33(6): 533-537.
2013, Vol. 34 
