提出一种基于球坐标的逆向哈特曼面形测量法,能够有效地降低非球面测量时的光线斜率,同时提高哈特曼法测量的动态范围和空间分辨率。利用该方法对口径340 mm非球面度较大的表面进行仿真测量,结果显示面形测量误差可保证在λ/10以内,高于直角坐标下的测量精度。该方法可用于光学生产现场对产品进行快速高精度测量, 测量成本低。
Abstract
A new method named inverse Hartmann surface form measurement based on spherical coordinates is presented. The method reduces the measured ray slope efficiently, increases the measurement dynamic range and spatial resolution simultaneously. A large asphericity surface with diameter 340mm is tested by the new method. The simulation result shows its accuracy of form error can be assured within λ/10, and is better than that in rectangular coordinates. It can be applied in on-line optic product evaluation rapidly and accurately with low cost.
关键词
计量学 /
逆向哈特曼 /
面形测量 /
非球面 /
球坐标
Key words
Metrology /
Inverse Hartmann system /
Surface form measurement /
Aspheric /
Spherical coordinates
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参考文献
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