单晶硅球密度的绝对测量是阿伏加德罗常数测量的关键技术。综述了单晶硅球密度测量的最新进展,包括硅球密度测量的技术原理、测量领域、影响因素、测量装置及最佳测量能力等等,分析了硅球密度测量的主要难点和关键技术,预测了相关研究的技术前景及发展趋势。
Abstract
To determine Avogadro constant, the absolute density measurement of the single crystal silicon sphere is a decisive procedure. The current status of the density measurement of the single crystal silicon sphere,including measurement principles,measurement fields,influence factors,measuring devices and the best ability for the diameter measurement are introduced . The main difficulties and key techniques of density measurement is analyzed,and the development trend and technology prospect in related fields is predicted.
关键词
计量学 /
硅球密度 /
相移干涉法 /
阿伏加德罗常数
Key words
Metrology /
Density of silicon sphere /
Phase-shifting interferometry /
Avogadro constant
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