并行像散共焦系统是基于共焦探测原理实现微结构的三维形貌测量。采用微透镜阵列进行光束分割,实现并行探测。引入像散原理减小光学系统中的干扰和波动对探测特性的影响。通过萃取图片序列中各个并行物点探测曲线的“零”点,实现物点正焦位置辨识。阐述了基于序列图片萃取物点探测曲线“零”点过程中涉及的图片序列中并行光场的定位与分割策略、差动光能统计算法的优化与实现、物点探测曲线轴向有效区域裁定及其特性拟合等关键问题。据此开发的软件“微结构探测系统”能够快速可靠地实现全场物点正焦信息萃取,为微结构形貌的精确三维建模及可视化测量奠定了基础。

Based on the principle of confocal microscopy,the parallel astigmatic confocal optics system is uesd to detecting the 3-D surface topography of the micro-structure.The system divided light beam with the micro-optic components to realize the parallel detecting.The astigmatic principle is introduced to restrain the interferences coming from the noise and the drift of light source and CCD.By means of searching the “zero” point in the characteristic curve,the in-focal position of the measured object points are extracted.The several key problems are discussed,which deal with the strategies of determining the positions of the astigmatic facula,the optimization and realization of the differential algorithm of the astigmatic principle,the decision of the interval for searching the “zero” point in the characteristic curve,and the fitting method of the characteristic curve etc.A software has been developded based on the research, which can implement extracting the “zero” points in the whole-field characteristic curve speedily and reliably.The research has foundational value for the the micro-structures 3-D profile reconstruction and visualization measurement technology.