基于等效面积法的线宽及线宽粗糙度测量

doi:10.3969/j.issn.1000-1158.2011.01.04

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计量学报 ›› 2011, Vol. 32 ›› Issue (1) : 16-19. DOI: 10.3969/j.issn.1000-1158.2011.01.04

基于等效面积法的线宽及线宽粗糙度测量

李洪波^1,2,赵学增³,赵维谦¹

作者信息 +

Measurement of Line-width and Line-width Roughness Based on Equivalent Area

LI Hong-bo^1,2,ZHAO Xue-zeng²,ZHAO Wei-qian¹

Author information +

文章历史 +

摘要

建立一种基于刻线边缘轮廓特征求取刻线线宽和线宽粗糙度的测量方法。理想情况下,刻线线宽方向截面为矩形,面积为该矩形高度和宽度的乘积。实际测量中,沿刻线线宽方向截面为一多边形,认为该多边形面积S1和理想矩形面积S相等。利用Tsai给出的台阶高度算法计算刻线单扫描轮廓的高度以获得线宽截面高度H。刻线等效宽度We可根据上述高度H和截面面积S1求出。线宽粗糙度定义为线宽变化的3倍标准偏差,因此线宽粗糙度也能用该方法求出。

Abstract

A method to measure line-width and line-width roughness (LWR) is presented based on the outline feature of the step scanned by AFM. Ideally, the step cross-section along the direction of the line-width is rectangle, whose area, S, is the product of height and line-width. Actually, the outline of the step cross-section is polygonal, whose area, S1, is equaled to S. The height of the profile scanned by AFM, H, is calculated by improving Tsai’s height algorithm. So, line-with, We, is calculated according to S1 and H. LWR is also calculated according to its definition as the 3σ value of line-width variation.

导出引用

李洪波,赵学增,赵维谦. 基于等效面积法的线宽及线宽粗糙度测量[J]. 计量学报. 2011, 32(1): 16-19 https://doi.org/10.3969/j.issn.1000-1158.2011.01.04

LI Hong-bo1,2,ZHAO Xue-zeng2,ZHAO Wei-qian1. Measurement of Line-width and Line-width Roughness Based on Equivalent Area[J]. Acta Metrologica Sinica. 2011, 32(1): 16-19 https://doi.org/10.3969/j.issn.1000-1158.2011.01.04

中图分类号： TB921

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